Website
http://dataportal.arc.gov.au/NCGP/API/grants/LE210100126
Funding Status
Closed
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Funded Activity Summary
Advanced Maskless Photolitography for Western Australia. This project aims to close an existing gap in micro- & nano-fabrication in Western Australia and provide access to advanced maskless photolithography in support of Australian research flagships of international excellence which include advanced infrared and quantum technologies, semiconductor optoelectronics, chemical engineering, microelectromechanical systems, as well as dark matter and gravitational wave discovery. Notably, the new capability is of utmost importance for five distinct ARC Centres in multidisciplinary areas and will be available to all researchers via the WA Node of Australian National Fabrication Facility in support of high impact scientific research and to maintain strong engagement with industry and Australian economy.Funded Activity Details
Start Date: 07-2021
End Date: 07-2022
Funding Scheme: Linkage Infrastructure, Equipment and Facilities
Funding Amount: $527,638.00
Funder: Australian Research Council
Research Topics
ANZSRC Field of Research (FoR)
Electrical and Electronic Engineering | Compound Semiconductors | Microelectronics and Integrated Circuits | Microelectromechanical Systems (MEMS)
ANZSRC Socio-Economic Objective (SEO)
Industrial Instruments | Integrated Circuits and Devices | Integrated Systems |
