ORCID Profile
0000-0001-7363-5304
Current Organisations
University of Adelaide
,
The University of Newcastle
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In Research Link Australia (RLA), "Research Topics" refer to ANZSRC FOR and SEO codes. These topics are either sourced from ANZSRC FOR and SEO codes listed in researchers' related grants or generated by a large language model (LLM) based on their publications.
Microelectromechanical Systems (MEMS) | Mechanical Engineering | Control Systems, Robotics and Automation | Calculus of Variations, Systems Theory and Control Theory | Dynamical Systems in Applications | Mechanical engineering | Applied Mathematics | Dynamics, Vibration and Vibration Control | Manufacturing Engineering | Microtechnology | Microelectromechanical systems (MEMS) |
Expanding Knowledge in Engineering | Scientific Instruments | Machined Metal Products | Industrial Instruments | Expanding Knowledge in the Physical Sciences | Industrial Machinery and Equipment | Medical Instruments | Expanding Knowledge in Technology
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 09-2010
Publisher: AIP Publishing
Date: 04-2017
DOI: 10.1063/1.4981530
Abstract: Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous d ing and tracking control of a high-speed vertical nanopositioning stage.
Publisher: Springer International Publishing
Date: 2016
Publisher: Elsevier BV
Date: 2010
Publisher: Elsevier BV
Date: 07-2017
Publisher: IEEE
Date: 11-2011
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 05-2020
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 06-2013
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 04-2018
Publisher: AIP Publishing
Date: 02-2013
DOI: 10.1063/1.4790474
Abstract: Atomic Force Microscopes (AFM) are used for generating surface topography of s les at micro to atomic resolutions. Many commercial AFMs use piezoelectric tube nanopositioners for scanning. Scanning rates of these microscopes are h ered by the presence of low frequency resonant modes. When inadvertently excited, these modes lead to high litude mechanical vibrations causing the loss of accuracy, while scanning, and eventually to break down of the tube. Feedback control has been used to d these resonant modes. Thereby, enabling higher scanning rates. Here, a multivariable controller is designed to d the first resonant mode along both the x and y axis. Exploiting the inherent symmetry in the piezoelectric tube, the multivariable control design problem is recast as independent single-input single-output (SISO) designs. This in conjunction with integral resonant control is used for d ing the first resonant mode.
Publisher: Institution of Engineering and Technology (IET)
Date: 05-2017
Publisher: IEEE
Date: 07-2009
Publisher: Elsevier BV
Date: 2011
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 02-2017
Publisher: Elsevier BV
Date: 06-2016
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 03-2015
Publisher: IEEE
Date: 11-2013
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 2014
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 06-2020
Publisher: IEEE
Date: 07-2010
Publisher: Elsevier BV
Date: 06-2009
Publisher: AIP Publishing
Date: 08-2017
DOI: 10.1063/1.4990451
Abstract: The quality (Q) factor is an important parameter of the resonance of the microcantilever as it determines both imaging bandwidth and force sensitivity. The ability to control the Q factor of multiple modes is believed to be of great benefit for atomic force microscopy techniques involving multiple eigenmodes. In this paper, we propose a novel cantilever design employing multiple piezoelectric transducers which are used for separated actuation and sensing, leading to guaranteed collocation of the first eight eigenmodes up to 3 MHz. The design minimizes the feedthrough usually observed with these systems by incorporating a guard trace on the cantilever chip. As a result, a multimode Q controller is demonstrated to be able to modify the quality factor of the first two eigenmodes over up to four orders of magnitude without sacrificing robust stability.
Publisher: IEEE
Date: 07-2009
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 15-07-2018
Publisher: IEEE
Date: 07-2017
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 12-2017
Publisher: IEEE
Date: 07-2011
Publisher: IEEE
Date: 07-2016
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 02-2020
Publisher: Elsevier BV
Date: 04-2008
Publisher: AIP Publishing
Date: 12-2012
DOI: 10.1063/1.4765048
Abstract: Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move s les with sub-nanometer resolution with positioning bandwidth in the kilohertz range. State-of-the-art designs incorporate uniquely designed flexure mechanisms driven by compact and stiff piezoelectric actuators. This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning. Future challenges and research topics are also discussed.
Publisher: IOP Publishing
Date: 10-02-2022
Abstract: QPlus sensors are non-contact atomic force microscope probes constructed from a quartz tuning fork and a tungsten wire with an electrochemically etched tip. These probes are self-sensing and offer an atomic-scale spatial resolution. Therefore, qPlus sensors are routinely used to visualize the chemical structure of adsorbed organic molecules via the so-called bond imaging technique. This is achieved by functionalizing the AFM tip with a single CO molecule and exciting the sensor at the first vertical cantilever resonance mode. Recent work using higher-order resonance modes has also resolved the chemical structure of single organic molecules. However, in these experiments, the image contrast can differ significantly from the conventional bond imaging contrast, which was suspected to be caused by unknown vibrations of the tip. This work investigates the source of these artefacts by using a combination of mechanical simulation and laser vibrometry to characterize a range of sensors with different tip wire geometries. The results show that increased tip mass and length cause increased torsional rotation of the tuning fork beam due to the off-center mounting of the tip wire, and increased flexural vibration of the tip. These undesirable motions cause lateral deflection of the probe tip as it approaches the s le, which is rationalized to be the cause of the different image contrast. The results also provide a guide for future probe development to reduce these issues.
Publisher: IEEE
Date: 07-2013
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 2022
Publisher: Elsevier BV
Date: 10-2023
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 2018
Publisher: IOP Publishing
Date: 09-01-2014
Publisher: IEEE
Date: 07-2015
Publisher: AIP Publishing
Date: 07-2008
DOI: 10.1063/1.2952506
Abstract: Piezoelectric tube scanners with quartered external electrodes are the most widely used nanopositioning technology in modern scanning probe microscopes. There has been increasing interest in utilizing feedback control techniques to improve bandwidth and accuracy of these nanopositioners. The use of feedback requires a sensor to be incorporated into the nanopositioning device. Noncontact displacement sensors, e.g., capacitive and inductive sensors, have been used for this purpose. However, their measurements contain a significant noise component if operated over large bandwidths. The piezoelectric voltage induced in a tube nanopositioner has been proposed recently as an alternative measure of displacement with a much improved noise figure, up to three orders of magnitude better than capacitive sensors. In this arrangement, an electrode is used to actuate the tube, while the opposite electrode is used as a sensor. This approach has two drawbacks: (i) the operating range of the tube is reduced to half and (ii) the tube is not driven symmetrically, thus the opposite sides of the tube experience asymmetric stresses, i.e., in this mode of operation, the scanner is not a perfectly collocated system. In this paper, we present a new electrode pattern for piezoelectric tube scanners which addresses the above problems and allows simultaneous sensing and actuation of the tube in an efficient way.
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 03-2012
Publisher: IEEE
Date: 2009
Publisher: IEEE
Date: 07-2015
Publisher: SPIE
Date: 02-04-2004
DOI: 10.1117/12.522258
Publisher: SPIE
Date: 02-04-2004
DOI: 10.1117/12.523573
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 03-2014
Publisher: Elsevier BV
Date: 03-2008
Publisher: IEEE
Date: 07-2014
Publisher: IEEE
Date: 07-2016
Publisher: AIP Publishing
Date: 03-2010
DOI: 10.1063/1.3314901
Abstract: This paper presents a piezoelectric tube scanner with a novel electrode pattern and describes how it may be used for simultaneous sensing and actuation. The electrodes are arranged such that the tube is driven in an antisymmetrical manner, resulting in a collocated system suitable for positive position feedback (PPF). A PPF controller is designed to d the scanner’s resonance. Piezoelectric strain-induced voltage is used as measurement. The device is then installed into an atomic force microscope to obtain open- and closed-loop images of a grating at 10, 15.6, and 31 Hz scan rates. The closed-loop images are noticeably superior to the open-loop images, illustrating the effectiveness of the proposed scanner when used simultaneously as a sensor and an actuator.
Publisher: Emerald
Date: 08-2004
DOI: 10.1108/01439910410541873
Abstract: Micromanipulation has enabled numerous technological breakthroughs in recent years, from advances in biotechnology to microcomponent assembly. Micromotion devices commonly use piezoelectric actuators (PZT) together with compliant mechanisms to provide fine motions with position resolution in the nanometre or even sub‐nanometre range. Many multiple degree of freedom (DOF) micromotion stages have parallel structures due to better stiffness and accuracy than serial structures. This paper presents the development of a three‐DOF compliant micromotion stage with flexure hinges and parallel structure for applications requiring motions in micrometres. The derivation of a simple linear kinematic model of the compliant mechanism is presented and simulation results before and after calibration are compared with results from finite element (FE) modeling and experiments. The position control system, which uses an experimentally determined constant‐Jacobian, and its performance are also presented and discussed.
Publisher: Elsevier BV
Date: 09-2016
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 04-2020
Publisher: IEEE
Date: 05-2012
Publisher: IEEE
Date: 07-2013
Publisher: Elsevier BV
Date: 2013
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 07-2021
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 08-2022
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 2009
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 04-2015
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 08-2019
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 03-2013
Publisher: IEEE
Date: 07-2012
Publisher: IOP Publishing
Date: 13-08-2010
DOI: 10.1088/0957-4484/21/36/365503
Abstract: A key hurdle in achieving high scan speeds in atomic force microscopes is that the probe is required to be scanned over the s le in a zig-zag raster pattern. The fast axis of the AFM scanner must track a signal that contains frequencies beyond its mechanical bandwidth. Consequently, fast raster scans generate distortions in the resulting image. We propose a smooth cycloid-like scan pattern that allows us to achieve scan speeds much higher than a raster scan. We illustrate how the proposed method can be implemented on a commercial AFM with minimal modifications.
Publisher: IEEE
Date: 07-2016
Publisher: Springer Berlin Heidelberg
Date: 2011
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 2023
Publisher: IEEE
Date: 07-2008
Publisher: AIP Publishing
Date: 06-2012
DOI: 10.1063/1.4725525
Abstract: Tracking of triangular or sawtooth waveforms is a major difficulty for achieving high-speed operation in many scanning applications such as scanning probe microscopy. Such non-smooth waveforms contain high order harmonics of the scan frequency that can excite mechanical resonant modes of the positioning system, limiting the scan range and bandwidth. Hence, fast raster scanning often leads to image distortion. This paper proposes analysis and design methodologies for a nonlinear and smooth closed curve, known as Lissajous pattern, which allows much faster operations compared to the ordinary scan patterns. A simple closed-form measure is formulated for the image resolution of the Lissajous pattern. This enables us to systematically determine the scan parameters. Using internal model controllers (IMC), this non-raster scan method is implemented on a commercial atomic force microscope driven by a low resonance frequency positioning stage. To reduce the tracking errors due to actuator nonlinearities, higher order harmonic oscillators are included in the IMC controllers. This results in significant improvement compared to the traditional IMC method. It is shown that the proposed IMC controller achieves much better tracking performances compared to integral controllers when the noise rejection performances is a concern.
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 06-2020
Publisher: Institution of Engineering and Technology (IET)
Date: 2012
Publisher: IOP Publishing
Date: 02-01-2019
Abstract: Atomic force microscope (AFM) cantilevers with integrated actuation and sensing provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interference. While cantilever microfabrication technology has continuously advanced over the years, the overall design has remained largely unchanged a passive rectangular shaped cantilever design has been adopted as the industry wide standard. In this article, we demonstrate multimode AFM imaging on higher eigenmodes as well as bimodal AFM imaging with cantilevers using fully integrated piezoelectric actuation and sensing. The cantilever design maximizes the higher eigenmode deflection sensitivity by optimizing the transducer layout according to the strain mode shape. Without the need for feedthrough cancellation, the read-out method achieves close to zero actuator/sensor feedthrough and the sensitivity is sufficient to resolve the cantilever Brownian motion.
Publisher: AIP Publishing
Date: 08-2016
DOI: 10.1063/1.4960080
Abstract: This article presents a high-speed single- and dual-stage vertical positioners for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage positioner has a displacement range of 7.6 μm and a first resonance frequency of 46.8 kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage positioner has a combined travel range of approximately 10 μm and a first evident resonance frequency of 130 kHz.
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 06-2014
Publisher: Beilstein Institut
Date: 06-02-2017
DOI: 10.3762/BJNANO.8.38
Abstract: Self-sensing techniques for atomic force microscope (AFM) cantilevers have several advantageous characteristics compared to the optical beam deflection method. The possibility of down scaling, parallelization of cantilever arrays and the absence of optical interference associated imaging artifacts have led to an increased research interest in these methods. However, for multifrequency AFM, the optimization of the transducer layout on the cantilever for higher order modes has not been addressed. To fully utilize an integrated piezoelectric transducer, this work alters the layout of the piezoelectric layer to maximize both the deflection of the cantilever and measured piezoelectric charge response for a given mode with respect to the spatial distribution of the strain. On a prototype cantilever design, significant increases in actuator and sensor sensitivities were achieved for the first four modes without any substantial increase in sensor noise. The transduction mechanism is specifically targeted at multifrequency AFM and has the potential to provide higher resolution imaging on higher order modes.
Publisher: IEEE
Date: 09-2015
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 06-2013
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 08-2019
Publisher: IEEE
Date: 02-2017
Publisher: AIP Publishing
Date: 10-2014
DOI: 10.1063/1.4897483
Abstract: A flexure-guided serial-kinematic XYZ nanopositioner for high-speed Atomic Force Microscopy is presented in this paper. Two aspects influencing the performance of serial-kinematic nanopositioners are studied in this work. First, mass reduction by using tapered flexures is proposed to increased the natural frequency of the nanopositioner. 25% increase in the natural frequency is achieved due to reduced mass with tapered flexures. Second, a study of possible sensor positioning in a serial-kinematic nanopositioner is presented. An arrangement of sensors for exact estimation of cross-coupling is incorporated in the proposed design. A feedforward control strategy based on phaser approach is presented to mitigate the dynamics and nonlinearity in the system. Limitations in design approach and control strategy are discussed in the Conclusion.
Start Date: 2017
End Date: 2019
Funder: Australian Research Council
View Funded ActivityStart Date: 2013
End Date: 2015
Funder: Australian Research Council
View Funded ActivityStart Date: 2019
End Date: 2019
Funder: Australian Research Council
View Funded ActivityStart Date: 2023
End Date: 12-2025
Amount: $560,000.00
Funder: Australian Research Council
View Funded ActivityStart Date: 2017
End Date: 06-2023
Amount: $296,000.00
Funder: Australian Research Council
View Funded ActivityStart Date: 06-2022
End Date: 06-2024
Amount: $210,000.00
Funder: Australian Research Council
View Funded ActivityStart Date: 01-2013
End Date: 07-2018
Amount: $375,000.00
Funder: Australian Research Council
View Funded ActivityStart Date: 04-2019
End Date: 04-2020
Amount: $438,783.00
Funder: Australian Research Council
View Funded ActivityStart Date: 10-2021
End Date: 10-2023
Amount: $183,437.00
Funder: Australian Research Council
View Funded Activity