ORCID Profile
0000-0002-6348-0879
Current Organisation
Griffith University - Gold Coast Campus
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Research Topics
In Research Link Australia (RLA), "Research Topics" refer to ANZSRC FOR and SEO codes. These topics are either sourced from ANZSRC FOR and SEO codes listed in researchers' related grants or generated by a large language model (LLM) based on their publications.
Top 5 Research Topics
ANZSRC Field of Research (FoR)
Microelectromechanical Systems (MEMS) | Mechanical Engineering | Mechanical engineering | Microelectromechanical systems (MEMS) | Microtechnology | Microelectronics and Integrated Circuits | Control Systems, Robotics and Automation | Chemical Characterisation of Materials | Nanoscale Characterisation | Manufacturing Engineering | Materials Engineering | Photonic and electro-optical devices sensors and systems (excl. communications) | Composite and Hybrid Materials | Electronics sensors and digital hardware | Electronic device and system performance evaluation testing and simulation
ANZSRC Socio-Economic Objective (SEO)
Expanding Knowledge in Technology | Expanding Knowledge in Engineering | Machined Metal Products | Diagnostic Methods | Industrial Instruments | Expanding Knowledge in the Physical Sciences | Industrial Machinery and Equipment | Medical Instruments | Scientific Instruments | Mining Machinery and Equipment | Integrated Circuits and Devices | Integrated Systems |
Related Links
Publications
Design and simulation of an integrated metal oxide based micro NO 2 gas sensor
Publisher: IEEE
Date: 11-2006
Sensitivity enhancement of piezoresistive micro acceleration sensors with Nanometer Stress Concentration Regions on sensing elements
Publisher: IEEE
Date: 06-2009
Optimization and characterizations of the dual axis gas gyroscope
Publisher: IEEE
Date: 2005
Development of 4-DOF soft-contact tactile sensor and application to gripping operation of robotics fingers
Publisher: IEEE
Date: 10-2006
An automated on-demand liquid marble generator based on electrohydrodynamic pulling
Publisher: AIP Publishing
Date: 05-2019
DOI: 10.1063/1.5094522
Abstract: Liquid marble is a recently emerging digital microfluidic platform with a wide range of applications. Conventional liquid marbles are synthesized by coating liquid droplets with a thin layer of hydrophobic powder. Existing and emerging applications of liquid marbles require a contamination-free synthesis of liquid marbles with a high degree of reproducibility of their volume. Despite this requirement, the synthesis of liquid marbles has been still carried out manually. Manual production of liquid marbles leads to inconsistent volume and the possibility of contamination. The synthesis of liquid marbles with submicroliter volume is difficult to achieve and prone to large errors. This paper discusses the design and development of the first automated on-demand liquid marble generator with submicroliter capability. The device utilizes electrohydrodynamic pulling of liquid droplets on to a hydrophobic powder bed and subsequently coats them with the hydrophobic powder to synthesize liquid marbles of a desired volume.
Thermal Flow Sensors for Harsh Environments
Publisher: MDPI AG
Date: 14-07-2017
DOI: 10.20944/PREPRINTS201707.0031.V1
Abstract: Flow sensing in hostile environment is of increasing interest for applications in automotive, aerospace, and chemical and resource industries. Compared to their counterparts, thermal flow sensors are attractive candidates due to the ease of fabrication, lack of moving parts and higher sensitivity. Recently, a number of thermal flow sensor prototypes have been reported in the literature demonstrating the measurement of fluid flows under hostile conditions. This paper summarizes the concept of thermal flow sensing, operational modes and transduction mechanisms. Then, the choice of materials and their corresponding properties are presented in details. The paper also reports recent progress in the development of thermal flow sensors for harsh environment. In addition, the issues and considerations in packaging are reviewed. Finally, we conclude the review with the future prospects.
Drilling Behavior of Flax/Poly(Lactic Acid) Bio-Composite Laminates: An Experimental Investigation
Publisher: Informa UK Limited
Date: 21-12-2018
Palladium Nanofiber Networks Hydrogen Sensor and Hydrogen-Actuated Switches
Publisher: Springer International Publishing
Date: 12-2018
Effect of 3C-SiC Layer Thickness on Lateral Photovoltaic Effect in 3C-SiC/Si Heterojunction
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 02-2023
Palladium microfiber network as a platform for hydrogen sensing applications
Publisher: Elsevier BV
Date: 08-2019
Influence of gallium ion beam acceleration voltage on the bend angle of amorphous silicon cantilevers
Publisher: IOP Publishing
Date: 11-05-2016
Abstract: This paper describes a plastic reshaping technique for Si thin membranes by using focused ion beam (FIB) processing. FIB is used to locally pattern and implant Ga ions into the membranes. The combination of Ga ion doping and alkali wet etching enables us to fabricate nanometer-thick Ga-ion-doped amorphous Si membranes, which can be bent upward at arbitrary angle by controlling the FIB beam irradiation condition. The bending mechanism is discussed in the light of Ga ions implanted depth from the membrane surface. By using this technique, a micrometer-sized chute structure with several different angles is produced.
Design and fabrication of polymer electrostatic comb-drive actuators for micro conveyer systems
Publisher: Institute of Electrical Engineers of Japan (IEE Japan)
Date: 2006
A novel electrothermally actuated RF MEMS switch for wireless applications
Publisher: IEEE
Date: 06-2013
Multidisciplinary approach to maximize angiogenesis and wound healing using piezoelectric surgery, concentrated growth factors and photobiomodulation for dental implant placement surgery involving lateral wall sinus lift: Two case reports
Publisher: Publiverse Online S.R.L
Date: 28-04-2020
Micromachined Coreless Single-Layer Transformer Without Crossovers
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 2015
Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure
Publisher: Elsevier BV
Date: 10-2018
Evaporation of Ethanol–Water Binary Mixture Sessile Liquid Marbles
Publisher: American Chemical Society (ACS)
Date: 09-06-2016
DOI: 10.1021/ACS.LANGMUIR.6B01272
Abstract: Liquid marble is a liquid droplet coated with particles. Recently, the evaporation process of a sessile liquid marble using geometric measurements has attracted great attention from the research community. However, the lack of gravimetric measurement limits further insights into the physical changes of a liquid marble during the evaporation process. Moreover, the evaporation process of a marble containing a liquid binary mixture has not been reported before. The present paper investigates the effective density and the effective surface tension of an evaporating liquid marble that contains aqueous ethanol at relatively low concentrations. The effective density of an evaporating liquid marble is determined from the concurrent measurement of instantaneous mass and volume. Density measurements combined with surface profile fitting provide the effective surface tension of the marble. We found that the density and surface tension of an evaporating marble are significantly affected by the particle coating.
Chemistry, Biosynthesis and Pharmacology of Viniferin: Potential Resveratrol-Derived Molecules for New Drug Discovery, Development and Therapy
Publisher: MDPI AG
Date: 09-08-2022
DOI: 10.3390/MOLECULES27165072
Abstract: Viniferin is a resveratrol derivative. Resveratrol is the most prominent stilbenoid synthesized by plants as a defense mechanism in response to microbial attack, toxins, infections or UV radiation. Different forms of viniferin exist, including alpha-viniferin (α-viniferin), beta-viniferin (β-viniferin), delta-viniferin (δ-viniferin), epsilon-viniferin (ε-viniferin), gamma-viniferin (γ-viniferin), R-viniferin (vitisin A), and R2-viniferin (vitisin B). All of these forms exhibit a range of important biological activities and, therefore, have several possible applications in clinical research and future drug development. In this review, we present a comprehensive literature search on the chemistry and biosynthesis of and the erse studies conducted on viniferin, especially with regards to its anti-inflammatory, antipsoriasis, antidiabetic, antiplasmodic, anticancer, anti-angiogenic, antioxidant, anti-melanogenic, neurodegenerative effects, antiviral, antimicrobial, antifungal, antidiarrhea, anti-obesity and anthelminthic activities. In addition to highlighting its important chemical and biological activities, coherent and environmentally acceptable methods for establishing vinferin on a large scale are highlighted to allow the development of further research that can help to exploit its properties and develop new phyto-pharmaceuticals. Overall, viniferin and its derivatives have the potential to be the most effective nutritional supplement and supplementary medication, especially as a therapeutic approach. More researchers will be aware of viniferin as a pharmaceutical drug as a consequence of this review, and they will be encouraged to investigate viniferin and its derivatives as pharmaceutical drugs to prevent future health catastrophes caused by a variety of serious illnesses.
Tactile Perception using Micro Force/Moment Sensor Embedded in Soft Fingertip
Publisher: IEEE
Date: 10-2006
Fabrication and characterization of 2-DOF micro convective accelerometer
Publisher: IEEE
Date: 10-2006
Low-cost multifunctional ionic liquid pressure and temperature sensor
Publisher: Springer International Publishing
Date: 12-2019
A Si micro conveyer system based on electrostatic comb-drive actuators
Publisher: IEEE
Date: 2005
Excellent Rectifying Properties of the n-3C-SiC/p-Si Heterojunction Subjected to High Temperature Annealing for Electronics, MEMS, and LED Applications
Publisher: Springer Science and Business Media LLC
Date: 18-12-2017
DOI: 10.1038/S41598-017-17985-9
Abstract: This work examines the stability of epitaxial 3C-SiC/Si heterojunctions subjected to heat treatments between 1000 °C and 1300 °C. Because of the potential for silicon carbide in high temperature and harsh environment applications, and the economic advantages of growing the 3C-SiC polytype on large diameter silicon wafers, its stability after high temperature processing is an important consideration. Yet recently, this has been thrown into question by claims that the heterojunction suffers catastrophic degradation at temperatures above 1000 °C. Here we present results showing that the heterojunction maintains excellent diode characteristics following heat treatment up to 1100 °C and while some changes were observed between 1100 °C and 1300 °C, diodes maintained their rectifying characteristics, enabling compatibility with a large range of device fabrication. The parameters of as-grown diodes were J 0 = 1 × 10 −11 A/mm 2 , n = 1.02, and +/−2V rectification ratio of 9 × 10 6 . Capacitance and thermal current-voltage analysis was used to characterize the excess current leakage mechanism. The change in diode characteristics depends on diode area, with larger areas (1 mm 2 ) having reduced rectification ratio while smaller areas (0.04 mm 2 ) maintained excellent characteristics of J 0 = 2 × 10 −10 A/mm 2 , n = 1.28, and +/−2V ratio of 3 × 10 6 . This points to localized defect regions degrading after heat treatment rather than a fundamental issue of the heterojunction.
Development of a dual axis convective gyroscope with embedded heater and low thermal-stress thermistors
Publisher: IEEE
Date: 10-2006
Simulation, fabrication and characterization of a three-axis piezoresistive accelerometer
Publisher: IOP Publishing
Date: 10-10-2006
Low-Cost Graphite on Paper Pressure Sensor for a Robot Gripper with a Trivial Fabrication Process
Publisher: MDPI AG
Date: 10-2018
DOI: 10.3390/S18103300
Abstract: A flexible pressure sensor with a rudimentary, ultra-low cost, and solvent-free fabrication process is presented in this paper. The sensor has a graphite-on-paper stacked paper structure, which deforms and restores its shape when pressure is applied and released, showing an exceptionally fast response and relaxation time of ≈0.4 ms with a sensitivity of −5%/Pa. Repeatability of the sensor over 1000 cycles indicates an excellent long-term stability. The sensor demonstrated fast and reliable human touch interface, and successfully integrated into a robot gripper to detect grasping forces, showing high promise for use in robotics, human interface, and touch devices.
Sensitive and fast response graphite pressure sensor fabricated by a solvent-free approach
Publisher: IEEE
Date: 10-2017
Ultraviolet and visible photodetection using 3C-SiC/Si hetero-epitaxial junction
Publisher: Springer International Publishing
Date: 12-2019
Carbon nanotube four-terminal devices for pressure sensing applications
Publisher: Springer International Publishing
Date: 12-2019
Flexible and Wearable Flow Sensor Using Spinnable Carbon Nanotube Nanofilm for Respiration Monitoring
Publisher: IEEE
Date: 2020
Characterization of the piezoresistance in highly doped p-type 3C-SiC at cryogenic temperatures
Publisher: Royal Society of Chemistry (RSC)
Date: 2018
DOI: 10.1039/C8RA05797D
Abstract: The piezoresistance in crystalline 3C-SiC epitaxially grown on Si was investigated at low temperatures down to 150 K. The large gauge factor in 3C-SiC indicates its feasibility for sensing applications in cryogenic environments.
Development of a dual-axis convective gyroscope with low thermal-induced stress sensing element
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 08-2007
Evaporation dynamics of liquid marbles at elevated temperatures
Publisher: Royal Society of Chemistry (RSC)
Date: 2018
DOI: 10.1039/C8RA02265H
Abstract: We investigate the evaporation behaviour of a group of liquid marbles at elevated temperature under various conditions.
Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect
Publisher: Elsevier BV
Date: 09-2020
Natural fiber–reinforced composites: A review on material, manufacturing, and machinability
Publisher: SAGE Publications
Date: 28-04-2019
Abstract: Interest in natural fiber–reinforced composites (NFRCs) is increasing rapidly thanks to their numerous advantages such as low cost, biodegradability, eco-friendly nature, relatively good mechanical properties, and a growing emphasis on the environmental and sustainability aspects of engineering materials. However, large-scale use of NFRCs is still considered as challenging due to the difficulties in manufacturing, limited knowledge of its machinability and appropriate parameter settings, and being prone to machining-induced defects. This article presents a comprehensive review on various aspects of NFRCs, with a focus on the manufacturing and machinability. It covers some recent works related to NFRCs, including the manufacturing processes and parameters, characterization of mechanical properties, applications, and machinability and machining process monitoring, many for the first time. The main challenges associated with machining of NFRCs and the induced damages are outlined, with special attention paid to the effect of physical properties of the fibers and manufacturing process on the machinability, along with the essential machining parameters that affect the quality of the machined surface. The research perspectives and the current application status are also discussed. The article is intended to help readers attain a fundamental understanding of key technologies and the state of the arts in this research area.
Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures
Publisher: IEEE
Date: 06-2019
A hot-film air flow sensor for elevated temperatures
Publisher: AIP Publishing
Date: 2019
DOI: 10.1063/1.5065420
Abstract: We report a novel packaging and experimental technique for characterizing thermal flow sensors at high temperatures. This paper first reports the fabrication of 3C-SiC (silicon carbide) on a glass substrate via anodic bonding, followed by the investigation of thermoresistive and Joule heating effects in the 3C-SiC nano-thin film heater. The high thermal coefficient of resistance of approximately −20 720 ppm/K at ambient temperature and −9287 ppm/K at 200 °C suggests the potential use of silicon carbide for thermal sensing applications in harsh environments. During the Joule heating test, a high-temperature epoxy and a brass metal sheet were utilized to establish the electric conduction between the metal electrodes and SiC heater inside a temperature oven. In addition, the metal wires from the sensor to the external circuitry were protected by a fiberglass insulating sheath to avoid short circuit. The Joule heating test ensured the stability of mechanical and Ohmic contacts at elevated temperatures. Using a hot-wire anemometer as a reference flow sensor, calibration tests were performed at 25 °C, 35 °C, and 45 °C. Then, the SiC hot-film sensor was characterized for a range of low air flow velocity, indicating a sensitivity of 5 mm−1 s. The air flow was established by driving a metal propeller connected to a DC motor and controlled by a microcontroller. The materials, metallization, and interconnects used in our flow sensor were robust and survived temperatures of around 200 °C.
A large pseudo-Hall effect in n-type 3C-SiC(100) and its dependence on crystallographic orientation for stress sensing applications
Publisher: Elsevier BV
Date: 02-2018
Design and simulation of MEMS based 5-DOF tactile force sensor
Publisher: IEEE
Date: 04-2016
Novel Low-Cost Sensor for Human Bite Force Measurement
Publisher: MDPI AG
Date: 06-08-2016
DOI: 10.3390/S16081244
A dual-color Total Internal Reflection (TIR)-based chip for simultaneous detection of two fluorophores
Publisher: IEEE
Date: 10-2008
Apparent thermal conductivity of photoluminescent C-dot nanofluid
Publisher: Elsevier BV
Date: 07-2019
The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 12-2015
Robust Free-Standing Nano-Thin SiC Membranes Enable Direct Photolithography for MEMS Sensing Applications
Publisher: Wiley
Date: 15-12-2018
Single-Crystalline 3C-SiC anodically Bonded onto Glass: An Excellent Platform for High-Temperature Electronics and Bioapplications
Publisher: American Chemical Society (ACS)
Date: 15-08-2017
Abstract: Single-crystal cubic silicon carbide has attracted great attention for MEMS and electronic devices. However, current leakage at the SiC/Si junction at high temperatures and visible-light absorption of the Si substrate are main obstacles hindering the use of the platform in a broad range of applications. To solve these bottlenecks, we present a new platform of single crystal SiC on an electrically insulating and transparent substrate using an anodic bonding process. The SiC thin film was prepared on a 150 mm Si with a surface roughness of 7 nm using LPCVD. The SiC/Si wafer was bonded to a glass substrate and then the Si layer was completely removed through wafer polishing and wet etching. The bonded SiC/glass s les show a sharp bonding interface of less than 15 nm characterized using deep profile X-ray photoelectron spectroscopy, a strong bonding strength of approximately 20 MPa measured from the pulling test, and relatively high optical transparency in the visible range. The transferred SiC film also exhibited good conductivity and a relatively high temperature coefficient of resistance varying from -12 000 to -20 000 ppm/K, which is desirable for thermal sensors. The biocompatibility of SiC/glass was also confirmed through mouse 3T3 fibroblasts cell-culturing experiments. Taking advantage of the superior electrical properties and biocompatibility of SiC, the developed SiC-on-glass platform offers unprecedented potentials for high-temperature electronics as well as bioapplications.
Optical and electrical characterizations of nanoscale robust 3c-SiC membrane for UV sensing applications
Publisher: Trans Tech Publications, Ltd.
Date: 08-2018
DOI: 10.4028/WWW.SCIENTIFIC.NET/KEM.775.278
Abstract: This paper presents the fabrication and optical characterization of an ultrathin 3C-SiC membrane for UV light detection. SiC nanoscale film was grown on Si substrate and subsequently released to form a robust membrane with a high aspect ratio of about 5000. Transmission measurements were performed to determine the thickness of the film with a high accuracy of 98%. We also employed a simple and highly effective direct wirebonding technique to form electrical contacts to the SiC membrane. The considerable change in the photocurrent of the SiC membrane was observed under UV illumination, indicating the potential of using 3C-SiC membranes for UV detection.
A single-layer micromachined tunable capacitor with an electrically floating plate
Publisher: IOP Publishing
Date: 14-03-2016
Strain Effect in Highly‐Doped n‐Type 3C‐SiC‐on‐Glass Substrate for Mechanical Sensors and Mobility Enhancement
Publisher: Wiley
Date: 22-07-2018
Design of a small-scale tactile sensor with three sensing points for using in robotic fingertips
Publisher: IEEE
Date: 05-2010
A 2-DOF convective micro accelerometer with a low thermal stress sensing element
Publisher: IOP Publishing
Date: 10-10-2007
Force/moment sensing during sliding motion using a micro sensor embedded in a soft fingertip
Publisher: IEEE
Date: 12-2008
A multi axis fluidic inertial sensor
Publisher: IEEE
Date: 10-2008
Measurement of mechanical and thermal properties of co-sputtered WSi thin film for MEMS applications
Publisher: Springer Science and Business Media LLC
Date: 30-06-2010
Highly sensitive p-type 4H-SiC van der Pauw sensor
Publisher: Royal Society of Chemistry (RSC)
Date: 2018
DOI: 10.1039/C7RA11922D
Abstract: This paper presents for the first time a p-type 4H silicon carbide (4H-SiC) van der Pauw strain sensor by utilizing the strain induced effect in four-terminal devices.
Deformation of a floating liquid marble.
Publisher: Royal Society of Chemistry (RSC)
Date: 2015
DOI: 10.1039/C4SM02882A
Abstract: We report the analytical and experimental characterisation of the deformation of a liquid marble floating on a liquid surface.
Large variability of bathypelagic microbial eukaryotic communities across the world’s oceans
Publisher: Springer Science and Business Media LLC
Date: 09-10-2015
Silicon micro-/nanomachining and applications
Publisher: Springer International Publishing
Date: 29-10-2017
Towards highly sensitive strain sensing based on nanostructured materials
Publisher: IOP Publishing
Date: 12-2010
DOI: 10.1088/2043-6262/1/4/045012
Abstract: This paper presents our recent theoretical and experimental study of piezo-effects in nanostructured materials for highly sensitive, high resolution mechanical sensors. The piezo-effects presented here include the piezoresistive effect in a silicon nanowire (SiNW) and single wall carbon nanotube (SWCNT) thin film, as well as the piezo-optic effect in a Si photonic crystal (PhC) nanocavity. Firstly, the electronic energy band structure of the silicon nanostructure is discussed and simulated by using the First-Principles Calculations method. The result showed a remarkably different energy band structure compared with that of bulk silicon. This difference in the electronic state will result in different physical, chemical, and therefore, sensing properties of silicon nanostructures. The piezoresistive effects of SiNW and SWCNT thin film were investigated experimentally. We found that, when the width of 〈 110 〉 p-type SiNW decreases from 500 to 35 nm, the piezoresistive effect increases by more than 60%. The longitudinal piezoresistive coefficient of SWCNT thin film was measured to be twice that of bulk p-type silicon. Finally, theoretical investigations of the piezo-optic effect in a PhC nanocavity based on Finite Difference Time Domain (FDTD) showed extremely high resolution strain sensing. These nanostructures were fabricated based on top-down nanofabrication technology. The achievements of this work are significant for highly sensitive, high resolution and miniaturized mechanical sensors.
Superior Robust Ultrathin Single-Crystalline Silicon Carbide Membrane as a Versatile Platform for Biological Applications
Publisher: American Chemical Society (ACS)
Date: 20-11-2017
Abstract: Micromachined membranes are promising platforms for cell culture thanks to their miniaturization and integration capabilities. Possessing chemical inertness, biocompatibility, and integration, silicon carbide (SiC) membranes have attracted great interest toward biological applications. In this paper, we present the batch fabrication, mechanical characterizations, and cell culture demonstration of robust ultrathin epitaxial deposited SiC membranes. The as-fabricated ultrathin SiC membranes, with an ultrahigh aspect ratio (length/thickness) of up to 20 000, possess high a fracture strength up to 2.95 GPa and deformation up to 50 μm. A high optical transmittance of above 80% at visible wavelengths was obtained for 50 nm membranes. The as-fabricated membranes were experimentally demonstrated as an excellent substrate platform for bio-MEMS/NEMS cell culture with the cell viability rate of more than 92% after 72 h. The ultrathin SiC membrane is promising for in vitro observations/imaging of bio-objects with an extremely short optical access.
Stretchable, Skin-Breathable, and Ultrasensitive Respiration Sensor Using Graphite on Paper With Smart Structures
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 09-2022
A multi-axis force-moment micro sensor for application in fluid mechanics
Publisher: IEEE
Date: 2002
Enhanced Photovoltaic Effect in n-3C-SiC/p-Si Heterostructure Using a Temperature Gradient for Microsensors
Publisher: American Chemical Society (ACS)
Date: 02-08-2023
Piezoresistive effect in silicon nanowires - A comprehensive analysis based on first-principles calculations
Publisher: IEEE
Date: 11-2009
Long-Lived, Transferred Crystalline Silicon Carbide Nanomembranes for Implantable Flexible Electronics
Publisher: American Chemical Society (ACS)
Date: 21-08-2019
Abstract: Implantable electronics are of great interest owing to their capability for real-time and continuous recording of cellular-electrical activity. Nevertheless, as such systems involve direct interfaces with surrounding biofluidic environments, maintaining their long-term sustainable operation, without leakage currents or corrosion, is a daunting challenge. Herein, we present a thin, flexible semiconducting material system that offers attractive attributes in this context. The material consists of crystalline cubic silicon carbide nanomembranes grown on silicon wafers, released and then physically transferred to a final device substrate (
Multimodule micro transportation system based on electrostatic comb-drive actuator and ratchet mechanism
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 02-2011
Development of an electrostatic micro transportation system (MTS) with strider-like movement of micro carts
Publisher: IEEE
Date: 11-2007
Experimental Investigation of Piezoresistive Effect in p-Type 4H–SiC
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 07-2017
Wireless Battery-Free SiC Sensors Operating in Harsh Environments Using Resonant Inductive Coupling
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 04-2019
Low-Dimensional Palladium on Graphite-on-Paper Substrate for Hydrogen Sensing
Publisher: MDPI AG
Date: 22-05-2022
DOI: 10.3390/S22103926
Abstract: To stabilize the detection signal of palladium-based hydrogen sensors on paper substrates, a graphite intermediate layer was painted on the surface of paper. The graphite-on-paper (GOP) substrate offers advantages such as good thermo-electrical conductivity, low cost, and uncomplicated preparation technology. Quasi-1-dimensional palladium (Pd) thin films with 8 nm and 60 nm thicknesses were deposited on the GOP substrates using the vacuum evaporation technique. Thanks to the unique properties of the GOP substrate, a continuous Pd microfiber network structure appeared after deposition of the ultra-thin Pd film. Additionally, the sensing performance of the palladium-based hydrogen sensor was not affected, whether using GOP or paper substrate at 25 °C. Surprisingly, heating-induced loss of sensitivity was restrained due to the increased electrical conductivity of the GOP substrate at 50 °C.
AlGaN/GaN 2-D Electron Gas for Highly Sensitive and High-Temperature Current Sensing
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 04-2021
Constrained Optimum Design of 3-DOF Microaccelerometers
Publisher: Informa UK Limited
Date: 04-07-2014
Dependence of offset voltage in AlGaN/GaN van der Pauw devices under mechanical strain
Publisher: Elsevier BV
Date: 06-2019
Thermoresistance of p-Type 4H–SiC Integrated MEMS Devices for High-Temperature Sensing
Publisher: Wiley
Date: 02-01-2019
Thermomagnetic Convection Around a Current-Carrying Wire in Ferrofluid
Publisher: ASME International
Date: 23-05-2017
DOI: 10.1115/1.4036688
Abstract: Thermomagnetic convection of a ferrofluid flow induced by the internal magnetic field around a vertical current-carrying wire was theoretically analyzed and experimentally validated for the first time. The Nusselt number for a heated 50-μm diameter wire in a ferrofluid was measured for different electrical currents and fluid temperatures. The experimental results are in a good agreement with the proposed scaling analysis. We found that increasing the current will increase the Nusselt number nonlinearly and ultimately enhances the heat transfer capability of the induced ferrofluid flow. We observed that the thermomagnetic convection becomes dominant, if large enough currents are applied.
Development of a flexible thermopile power generator utilizing BiTe-Cu thin films
Publisher: Institute of Electrical Engineers of Japan (IEE Japan)
Date: 2008
Chatter detection in milling processes—a review on signal processing and condition classification
Publisher: Springer Science and Business Media LLC
Date: 07-02-2023
DOI: 10.1007/S00170-023-10969-2
Abstract: Among the erse challenges in machining processes, chatter has a significant detrimental effect on surface quality and tool life, and it is a major limitation factor in achieving higher material removal rate. Early detection of chatter occurrence is considered a key element in the milling process automation. Online detection of chatter onset has been continually investigated over several decades, along with the development of new signal processing and machining condition classification approaches. This paper presents a review of the literature on chatter detection in milling, providing a comprehensive analysis of the reported methods for sensing and testing parameter design, signal processing and various features proposed as chatter indicators. It discusses data-driven approaches, including the use of different techniques in the time–frequency domain, feature extraction, and machining condition classification. The review outlines the potential of using multiple sensors and information fusion with machine learning. To conclude, research trends, challenges and future perspectives are presented, with the recommendation to study the tool wear effects, and chatter detection at dissimilar milling conditions, while utilization of considerable large datasets—Big Data—under the Industry 4.0 framework and the development of machining Digital Twin capable of real-time chatter detection are considered as key enabling technologies for intelligent manufacturing.
Fabrication and basic characterization of a piezoelectric valveless micro jet pump
Publisher: IOP Publishing
Date: 14-11-2008
DOI: 10.1143/JJAP.47.8615
Development of a 3-DOF Micro Accelerometer with Wireless Readout
Publisher: Institute of Electrical Engineers of Japan (IEE Japan)
Date: 2008
Novel micro transportation systems based on ratchet mechanism and electrostatic actuators
Publisher: IEEE
Date: 06-2007
Nanostrain sensing based on piezo-optic property of a photonic crystal cavity
Publisher: Institute of Electrical Engineers of Japan (IEE Japan)
Date: 2011
Theoretical investigation of piezo-optic effect in photonic crystal nanocavity for nanostrain detection
Publisher: IEEE
Date: 11-2010
Piezoresistive and thermoelectric effects of CNT thin film patterned by EB lithography
Publisher: IEEE
Date: 10-2009
Flexible and multifunctional electronics fabricated by a solvent-free and user-friendly method
Publisher: Royal Society of Chemistry (RSC)
Date: 2016
DOI: 10.1039/C6RA14646E
Abstract: Pencil-drawn flexible and multifunctional electronic devices have been proven to show potential for various applications including mass and flow sensors, human-motion detection and wearable thermal therapy.
Liquid marble coalescence via vertical collision
Publisher: Royal Society of Chemistry (RSC)
Date: 2018
DOI: 10.1039/C8SM00121A
Abstract: We determined the critical condition for the coalescence of two identical liquid marbles through collision.
An On-Chip SiC MEMS Device with Integrated Heating, Sensing, and Microfluidic Cooling Systems
Publisher: Wiley
Date: 12-08-2018
Design and Fabrication of a Miniaturized Three-Degree-of-Freedom Piezoresistive Acceleration Sensor Based on MEMS Technology Using Deep Reactive Ion Etching
Publisher: Springer Berlin Heidelberg
Date: 2009
Investigation of strain sensitivity of photonic crystal nanocavity for mechanical sensing
Publisher: IEEE
Date: 08-2010
Ultra-thin LPCVD silicon carbide membrane: A promising platform for bio-cell culturing
Publisher: IEEE
Date: 2018
Micromachined NH 3 gas sensor with ppb-level sensitivity based on WO 3 nanoparticles thinfilm
Publisher: Elsevier BV
Date: 2011
Optothermotronic effect as an ultrasensitive thermal sensing technology for solid-state electronics
Publisher: American Association for the Advancement of Science (AAAS)
Date: 29-05-2020
Abstract: Optothermotronics enable a giant temperature coefficient of resistance using optoelectronic modulation of electric potential.
Monolithic Multicolor Total Internal Reflection (TIR)-Based Chip for Highly-Sensitive Multifluorescence Detection and Imaging
Publisher: IEEE
Date: 2009
Vertical Piezo-Optoelectronic Coupling in a 3C-SiC/Si Heterostructure for Self-Powered and Highly Sensitive Mechanical Sensing
Publisher: American Chemical Society (ACS)
Date: 30-05-2023
Integrated CNTs thin film for MEMS mechanical sensors
Publisher: Elsevier BV
Date: 12-2010
A rapid and cost-effective metallization technique for 3C–SiC MEMS using direct wire bonding
Publisher: Royal Society of Chemistry (RSC)
Date: 2018
DOI: 10.1039/C8RA00734A
Abstract: This paper presents a simple, rapid and cost-effective wire bonding technique for single crystalline silicon carbide (3C–SiC) MEMS devices.
Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating
Publisher: IOP Publishing
Date: 05-06-2017
Evaluation of the piezoresistive effect in single crystalline silicon nanowires
Publisher: IEEE
Date: 10-2009
Design and fabrication process of a micropump using bulk Pb(Zr,Ti)O 3 for microfluidic devices
Publisher: SPIE
Date: 21-12-2008
DOI: 10.1117/12.759548
Polyacrylonitrile-carbon Nanotube-polyacrylonitrile: A Versatile Robust Platform for Flexible Multifunctional Electronic Devices in Medical Applications
Publisher: Wiley
Date: 19-03-2019
Fabrication of a sensitive pressure sensor using carbon nanotube micro-yarns
Publisher: IEEE
Date: 10-2017
Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology
Publisher: SPIE-Intl Soc Optical Eng
Date: 10-2009
DOI: 10.1117/1.3268366
Optimum design considerations for a 3-DOF micro accelerometer using nanoscale piezoresistors
Publisher: IEEE
Date: 2008
Design and simulation of a novel 3-DOF MEMS convective gyroscope
Publisher: Institute of Electrical Engineers of Japan (IEE Japan)
Date: 2008
Study on fabrication of polymer electrostatic comb-drive actuator by DXRL technique
Publisher: IEEE
Date: 11-2006
Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical coupling
Publisher: Springer Science and Business Media LLC
Date: 26-10-2014
Utilizing large hall offset voltage for conversion free 4H-SiC strain sensor
Publisher: IEEE
Date: 2018
Core-Shell Beads Made by Composite Liquid Marble Technology as A Versatile Microreactor for Polymerase Chain Reaction
Publisher: MDPI AG
Date: 26-02-2020
DOI: 10.3390/MI11030242
Abstract: Over the last three decades, the protocols and procedures of the DNA lification technique, polymerase chain reaction (PCR), have been optimized and well developed. However, there have been no significant innovations in processes for s le dispersion for PCR that have reduced the amount of single-use or unrecyclable plastic waste produced. To address the issue of plastic waste, this paper reports the synthesis and successful use of a core-shell bead microreactor using photopolymerization of a composite liquid marble as a dispersion process. This platform uses the core-shell bead as a simple and effective s le dispersion medium that significantly reduces plastic waste generated compared to conventional PCR processes. Other improvements over conventional PCR processes of the novel dispersion platform include increasing the throughput capability, enhancing the performance and portability of the thermal cycler, and allowing for the contamination-free storage of s les after thermal cycling.
A dual axis accelerometer utilizing low doped silicon thermistor
Publisher: Institute of Electrical Engineers of Japan (IEE Japan)
Date: 2006
Testosterone stimulates extra‐hepatic but not hepatic fat oxidation (Fox): comparison of oral and transdermal testosterone administration in hypopituitary men
Publisher: Wiley
Date: 05-10-2009
DOI: 10.1111/J.1365-2265.2009.03524.X
Abstract: Fat mass is increased in hypogonadal men and the changes are reversed by testosterone replacement. Testosterone administration enhances whole body fat oxidation (Fox). Fat is oxidized in the liver and in extra-hepatic tissues. To determine whether the stimulation of Fox by testosterone arises primarily from the liver or from extra-hepatic tissues. This was an open-label cross-over study. Thirteen men with hypopituitarism (age 53.1 +/- 4.1 years) with both growth hormone (GH) and testosterone deficiency were studied sequentially after 2 weeks of treatment with transdermal testosterone (5 mg), no treatment, and stepwise incremental doses of oral crystalline testosterone (10, 20, 40 and 80 mg) in the absence of GH replacement. Serum testosterone, IGF-I, metabolic effects [resting energy expenditure (REE) and Fox], SHBG, and thyroid binding globulin (TBG) as markers of excessive hepatic androgen exposure, were measured at the end of each treatment period. When compared to the no-treatment phase, mean blood testosterone levels rose into the physiological range after transdermal testosterone delivery but did not significantly change after 10, 20, 40 or 80 mg oral testosterone treatment. Blood SHBG and TBG fell significantly with 80 mg oral testosterone dose but were unaffected by any other testosterone treatment. Fox increased significantly with transdermal but not with any dose of oral testosterone. Mean plasma IGF-I and REE were unaffected by testosterone, regardless of the route or dose. Short-term testosterone administration does not stimulate hepatic fat oxidation but enhances whole body fat oxidation by acting on extra-hepatic tissues.
A Novel Three-State Contactless RF Micromachined Switch for Wireless Applications
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 12-2015
Opto-electronic coupling in semiconductors: towards ultrasensitive pressure sensing
Publisher: Royal Society of Chemistry (RSC)
Date: 2020
DOI: 10.1039/D0TC00229A
Abstract: A novel concept of opto-electronic coupling in semiconductor heterojunctions for pressure sensing is proposed. By using non-uniform illumination of visible light coupling with tuning current, performance of the pressure sensor is enormously enhanced.
Analysis of sliding of a soft fingertip embedded with a novel micro force/moment sensor: Simulation, experiment, and application
Publisher: IEEE
Date: 05-2009
Optoelectronic Enhancement for Piezoresistive Pressure Sensor
Publisher: IEEE
Date: 2020
Electrical Resistance of Carbon Nanotube Yarns under Compressive Transverse Pressure
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 04-2018
Combination effect of waviness and vacancy defects on the natural frequency of single walled carbon nanotubes
Publisher: American Scientific Publishers
Date: 08-2016
Development of a dual-axis thermal convective gas gyroscope
Publisher: IOP Publishing
Date: 19-05-2006
Giant piezoresistive effect by optoelectronic coupling in a heterojunction
Publisher: Springer Science and Business Media LLC
Date: 12-09-2019
DOI: 10.1038/S41467-019-11965-5
Abstract: Enhancing the piezoresistive effect is crucial for improving the sensitivity of mechanical sensors. Herein, we report that the piezoresistive effect in a semiconductor heterojunction can be enormously enhanced via optoelectronic coupling. A lateral photovoltage, which is generated in the top material layer of a heterojunction under non-uniform illumination, can be coupled with an optimally tuned electric current to modulate the magnitude of the piezoresistive effect. We demonstrate a tuneable giant piezoresistive effect in a cubic silicon carbide/silicon heterojunction, resulting in an extraordinarily high gauge factor of approximately 58,000, which is the highest gauge factor reported for semiconductor-based mechanical sensors to date. This gauge factor is approximately 30,000 times greater than that of commercial metal strain gauges and more than 2,000 times greater than that of cubic silicon carbide. The phenomenon discovered can pave the way for the development of ultra-sensitive sensor technology.
Liquid marbles as biochemical reactors for the polymerase chain reaction
Publisher: Royal Society of Chemistry (RSC)
Date: 2019
DOI: 10.1039/C9LC00676A
Abstract: Liquid marbles can serve as a biochemical reactor for the polymerase chain reaction, eliminating the conventional single use plastic reaction vial.
Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring
Publisher: Institute of Electrical Engineers of Japan (IEE Japan)
Date: 2009
Wet oxidation of 3C-SiC on Si for MEMS processing and use in harsh environments: Effects of the film thicknesses, crystalline orientations, and growth temperatures
Publisher: Elsevier BV
Date: 2021
Novel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuator
Publisher: IOP Publishing
Date: 18-05-2011
Giant Lateral Photovoltage in a SiC/Si Heterojunction with a Micro Free-Standing SiC Serpentine Beam
Publisher: American Chemical Society (ACS)
Date: 11-08-2022
Generation of a Charge Carrier Gradient in a 3C-SiC/Si Heterojunction with Asymmetric Configuration
Publisher: American Chemical Society (ACS)
Date: 09-11-2021
A fully integrated MEMS-based convective 3-DOF gyroscope
Publisher: IEEE
Date: 06-2007
Versatile microfluidic total internal reflection (TIR)-based devices: Application to microbeads velocity measurement and single molecule detection with upright and inverted microscope
Publisher: Royal Society of Chemistry (RSC)
Date: 2009
DOI: 10.1039/B807408A
Abstract: A poly(dimethylsiloxane) (PDMS) chip for Total Internal Reflection (TIR)-based imaging and detection has been developed using Si bulk micromachining and PDMS casting. In this paper, we report the applications of the chip on both inverted and upright fluorescent microscopes and confirm that two types of s le delivery platforms, PDMS microchannel and glass microchannel, can be easily integrated depending on the magnification of an objective lens needed to visualize a s le. Although any device configuration can be achievable, here we performed two experiments to demonstrate the versatility of the microfluidic TIR-based devices. The first experiment was velocity measurement of Nile red microbeads with nominal diameter of 500 nm in a pressure-driven flow. The time-sequenced fluorescent images of microbeads, illuminated by an evanescent field, were cross-correlated by a Particle Image Velocimetry (PIV) program to obtain near-wall velocity field of the microbeads at various flow rates from 500 nl/min to 3000 nl/min. We then evaluated the capabilities of the device for Single Molecule Detection (SMD) of fluorescently labeled DNA molecules from 30 bp to 48.5 kbp and confirm that DNA molecules as short as 1105 bp were detectable. Our versatile, integrated device could provide low-cost and fast accessibility to Total Internal Reflection Fluorescent Microscopy (TIRFM) on both conventional upright and inverted microscopes. It could also be a useful component in a Micro-Total Analysis System (micro-TAS) to analyze nanoparticles or biomolecules near-wall transport or motion.
Tangential and perpendicular driving micro transmission systems based on ratchet mechanism and electrostatic actuator
Publisher: IEEE
Date: 06-2009
Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure
Publisher: Institute of Electrical Engineers of Japan (IEE Japan)
Date: 2010
A novel micro transportation system with fast movement of a micro container based on electrostatic actuation and a ratchet mechanism
Publisher: IOP Publishing
Date: 15-10-2010
Design, simulation and fabrication of a total internal reflection (TIR)-based chip for highly sensitive fluorescent imaging
Publisher: IOP Publishing
Date: 04-05-2007
Straight movement of micro containers based on ratchet mechanisms and electrostatic comb-drive actuators
Publisher: IOP Publishing
Date: 18-10-2006
A survey of practical equations for prediction of effective thermal conductivity of spherical-particle nanofluids
Publisher: Elsevier BV
Date: 11-2015
Soft ionic liquid multi-point touch sensor
Publisher: Royal Society of Chemistry (RSC)
Date: 2019
DOI: 10.1039/C9RA00322C
Abstract: Here we report on an ionic liquid based soft pressure sensor. Our use of smart structures and ease of fabrication processes enable the development of a soft and low-cost sensor with multiple-point sensing capabilities on a single chip.
Demodulation Band Optimization in Envelope Analysis for Fault Diagnosis of Rolling Element Bearings Using a Real-Coded Genetic Algorithm
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 2019
A Wearable, Bending-Insensitive Respiration Sensor Using Highly Oriented Carbon Nanotube Film
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 15-03-2021
Formation Techniques Used in Shape-Forming Microrobotic Systems with Multiple Microrobots: A Review
Publisher: MDPI AG
Date: 16-11-2022
DOI: 10.3390/MI13111987
Abstract: Multiple robots are used in robotic applications to achieve tasks that are impossible to perform as in idual robotic modules. At the microscale/nanoscale, controlling multiple robots is difficult due to the limitations of fabrication technologies and the availability of on-board controllers. This highlights the requirement of different approaches compared to macro systems for a group of microrobotic systems. Current microrobotic systems have the capability to form different configurations, either as a collectively actuated swarm or a selectively actuated group of agents. Magnetic, acoustic, electric, optical, and hybrid methods are reviewed under collective formation methods, and surface anchoring, heterogeneous design, and non-uniform control input are significant in the selective formation of microrobotic systems. In addition, actuation principles play an important role in designing microrobotic systems with multiple microrobots, and the various control systems are also reviewed because they affect the development of such systems at the microscale. Reconfigurability, self-adaptable motion, and enhanced imaging due to the aggregation of modules have shown potential applications specifically in the biomedical sector. This review presents the current state of shape formation using microrobots with regard to forming techniques, actuation principles, and control systems. Finally, the future developments of these systems are presented.
Ultrasensitive Self-Powered Position-Sensitive Detector Based on n-3C-SiC/p-Si Heterojunctions
Publisher: American Chemical Society (ACS)
Date: 09-02-2022
Enhanced Electrohydrodynamics for Electrospinning a Highly Sensitive Flexible Fiber-Based Piezoelectric Sensor
Publisher: American Chemical Society (ACS)
Date: 07-03-2022
Multimodal Fibrous Static and Dynamic Tactile Sensor
Publisher: American Chemical Society (ACS)
Date: 03-06-2022
Biogeography of bacterial communities exposed to progressive long-term environmental change
Publisher: Springer Science and Business Media LLC
Date: 20-12-2012
Paper-Based Electronics Using Graphite and Silver Nanoparticles for Respiration Monitoring
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 15-12-2019
Ultra miniature µ-accelerometer for wearable physical activity monitoring systems
Publisher: IEEE
Date: 11-2009
Characterization of the piezoresistive effect and temperature coefficient of resistance in single crystalline silicon nanowires
Publisher: IEEE
Date: 11-2009
Is geriatric assessment being incorporated into general oncology?
Publisher: Elsevier BV
Date: 04-2014
A Generalized Analytical Model for Joule Heating of Segmented Wires
Publisher: ASME International
Date: 30-03-2018
DOI: 10.1115/1.4038829
Abstract: This paper presents an analytical solution for the Joule heating problem of a segmented wire made of two materials with different properties and suspended as a bridge across two fixed ends. The paper first establishes the one-dimensional (1D) governing equations of the steady-state temperature distribution along the wire with the consideration of heat conduction and free-heat convection phenomena. The temperature coefficient of resistance of the constructing materials and the dimension of the each segmented wires were also taken into account to obtain analytical solution of the temperature. COMSOL numerical solutions were also obtained for initial validation. Experimental studies were carried out using copper and nichrome wires, where the temperature distribution was monitored using an IR thermal camera. The data showed a good agreement between experimental data and the analytical data, validating our model for the design and development of thermal sensors based on multisegmented structures.
Light-Harvesting Self-Powered Monolithic-Structure Temperature Sensing Based on 3C-SiC/Si Heterostructure
Publisher: American Chemical Society (ACS)
Date: 06-05-2022
Abstract: Utilizing harvesting energy to power sensors has been becoming more critical in the current age of the Internet of Things. In this paper, we propose a novel technology using a monolithic 3C-SiC/Si heterostructure to harvest photon energy to power itself and simultaneously sense the surrounding temperature. The 3C-SiC/Si heterostructure converts photon energy into electrical energy, which is manifested as a lateral photovoltage across the top material layer of the heterostructure. Simultaneously, the lateral photovoltage varies with the surrounding temperature, and this photovoltage variation with temperature is used to monitor the temperature. We characterized the thermoresistive properties of the 3C-SiC/Si heterostructure, evaluated its energy conversion, and investigated its performance as a light-harvesting self-powered temperature sensor. The resistance of the heterostructure gradually drops with increasing temperature with a temperature coefficient of resistance (TCR) ranging from more than -3500 to approximately -8200 ppm/K. The generated lateral photovoltage is as high as 58.8 mV under 12 700 lx light illumination at 25 °C. The sensitivity of the sensor in the self-power mode is as high as 360 μV·K
Design and fabrication of a miniaturized six-degree-of-freedom piezoresistive accelerometer
Publisher: IOP Publishing
Date: 21-07-2005
Advances in electrode and electrolyte improvements in vanadium redox flow batteries with a focus on the nanofluidic electrolyte approach
Publisher: Elsevier BV
Date: 10-2020
Ultra miniature novel three-axis micro accelerometer
Publisher: IEEE
Date: 10-2009
A fluid density sensor based on a resonant tube
Publisher: IOP Publishing
Date: 12-08-2014
PMMA high sensitive capacitive micro accelerometer fabricated based on hot embossing
Publisher: IEEE
Date: 10-2009
A new structure of Tesla coupled nozzle in synthetic jet micro-pump
Publisher: Elsevier BV
Date: 11-2020
Fabrication and characterization of 4-DOF soft-contact tactile sensor and application to robot fingers
Publisher: IEEE
Date: 11-2006
Design of Metal MUMPs based LLC resonant converter for on-chip power supplies
Publisher: IEEE
Date: 06-2013
3C-SiC/Si Heterostructure: An Excellent Platform for Position-Sensitive Detectors Based on Photovoltaic Effect
Publisher: American Chemical Society (ACS)
Date: 03-10-2019
Abstract: Single-crystalline silicon carbide (3C-SiC) on the Si substrate has drawn significant attention in recent years due to its low wafer cost and excellent mechanical, chemical, and optoelectronic properties. However, the applications of the structure have primarily been focused on piezoresistive and pressure sensors, bio-microelectromechanical system, and photonics. Herein, we report another promising application of the heterostructure as a laser spot position-sensitive detector (PSD) based on the lateral photovoltaic effect (LPE) under nonuniform optical illuminations at zero-bias conditions. The LPE shows a linear dependence on spot positions, and the sensitivity is found to be as high as 33 mV/mm under an illumination of 2.8 W/cm
Polymer-MEMS torsion mirror with large rotation angle and low driving voltage
Publisher: IEEE
Date: 08-2010
Design and Simulation of MEMS Based Piezoresitive Pressure Sensor for Microfluidic Applications
Publisher: IEEE
Date: 05-2018
Floating mechanism of a small liquid marble
Publisher: Springer Science and Business Media LLC
Date: 23-02-2016
DOI: 10.1038/SREP21777
Abstract: Flotation of small solid objects and liquid droplets on water is critical to natural and industrial activities. This paper reports the floating mechanism of liquid marbles, or liquid droplets coated with hydrophobic microparticles. We used X-ray computed tomography (XCT) to acquire cross-sectional images of the floating liquid marble and interface between the different phases. We then analysed the shape of the liquid marble and the angles at the three-phase contact line (TPCL). We found that the small floating liquid marbles follow the mechanism governing the flotation of solid objects in terms of surface tension forces. However, the contact angles formed and deformation of the liquid marble resemble that of a sessile liquid droplet on a thin, elastic solid. For small liquid marbles, the contact angle varies with volume due to the deformability of the interface.
Stretchable respiration sensors: Advanced designs and multifunctional platforms for wearable physiological monitoring
Publisher: Elsevier BV
Date: 10-2020
Squeezing in lithium niobate waveguides
Publisher: SPIE
Date: 30-12-2019
DOI: 10.1117/12.2539899
High-temperature tolerance of the piezoresistive effect in p-4H-SiC for harsh environment sensing
Publisher: Royal Society of Chemistry (RSC)
Date: 2018
DOI: 10.1039/C8TC03094D
Abstract: 4H-silicon carbide based sensors are promising candidates for replacing prevalent silicon-based counterparts in harsh environments owing to their superior chemical inertness, high stability and reliability.
Isotropic piezoresistance of p-type 4H-SiC in (0001) plane
Publisher: AIP Publishing
Date: 02-07-2018
DOI: 10.1063/1.5037545
Abstract: In this work, the isotropic piezoresistance in the (0001) plane of p-type 4H-SiC was discovered by means of the hole energy shift calculation and the coordinate transformation. These results were also confirmed by the measurement of the piezoresistance using a bending beam method. The fundamental longitudinal and transverse piezoresistive coefficients π11 and π12 were found to be 6.43 × 10−11 Pa−1 and −5.12 × 10−11 Pa−1, respectively. The isotropy of the piezoresistance in the basal plane of p-type 4H-SiC is attributed to the isotropic hole energy shift under uniaxial strain. This interesting phenomenon in p-type 4H-SiC is promising for the design and fabrication of mechanical sensors and strain-engineered electronics since high sensitivity and consistent performance can be achieved regardless of the crystallographic orientation.
A Total Internal Reflection (TIR)-Based Chip for Ultra-Sensitive Fluorescent Sensing
Publisher: IEEE
Date: 06-2007
Charge reduced nanoparticles by sub-kHz ac electrohydrodynamic atomization toward drug delivery applications
Publisher: AIP Publishing
Date: 13-01-2020
DOI: 10.1063/1.5133714
Abstract: In this Letter, we present an electrohydrodynamic atomization (EHDA) technology that generates and delivers charge reduced nanoparticles to open space without a collector electrode. The backward ring-nozzle ac EHDA system driven at sub-kHz frequencies generates alternatively charged particles, which exert electric force and recombine in the vicinity of the spraying electrode. This unique configuration creates a stable jet stream of charge reduced nanoparticles, contrary to classical dc EHDA systems. Experiments indicate that nanoparticles are emitted through a wide range of voltages and frequencies, matching up to the hydrodynamic time of the cone jet model. These unique advantages of the new system would empower the nanoparticle EHDA devices for aerosol drug delivery in bio and health care applications.
Strain sensitivity of a modified single-defect photonic crystal nanocavity for mechanical sensing
Publisher: IEEE
Date: 11-2010
Digital polymerase chain reaction technology-recent advances and future perspectives
Publisher: Royal Society of Chemistry (RSC)
Date: 2018
DOI: 10.1039/C8LC00990B
Abstract: We critically evaluate the state of the art of the development of digital polymerase chain reaction systems.
Active implant for optoacoustic natural sound enhancement
Publisher: SPIE
Date: 08-02-2017
DOI: 10.1117/12.2251912
Evaluation and analysis of physical properties of nanomaterials for highly sensitive mechanical sensing devices
Publisher: Institute of Electrical Engineers of Japan (IEE Japan)
Date: 2010
Development of a miniaturized NO
Publisher: IEEE
Date: 11-2010
Thermomagnetic convection of ferrofluid in non-uniform magnetic field arround a current carrying wire
Publisher: Begellhouse
Date: 2017
High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments
Publisher: Elsevier BV
Date: 07-2020
A planar fractal micro-transformer with air core and hilbert curve
Publisher: Springer Science and Business Media LLC
Date: 12-07-2014
Development of a monolithic PMMA comb-drive micro actuator utilizing hot embossing and ultra-precision machining
Publisher: IEEE
Date: 2009
Advances in ultrasensitive piezoresistive sensors: from conventional to flexible and stretchable applications
Publisher: Royal Society of Chemistry (RSC)
Date: 2021
DOI: 10.1039/D1MH00538C
Abstract: This paper comprehensively reviews methods and approaches to enhance the piezoresistive effect, ranging from the quantum physical effect and new materials to nanoscopic and macroscopic structures, and from conventional rigid to soft electronic applications.
A fully functional micro transportation system with strider-like movement of micro containers
Publisher: IEEE
Date: 2008
A Monolithic Dual-Color Total-Internal-Reflection-Based Chip for Highly Sensitive and High-Resolution Dual-Fluorescence Imaging
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 12-2009
Unintentionally Doped Epitaxial 3C-SiC(111) Nanothin Film as Material for Highly Sensitive Thermal Sensors at High Temperatures
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 04-2018
A miniaturized transient hot-wire device for measuring thermal conductivity of non-conductive fluids
Publisher: Springer Science and Business Media LLC
Date: 21-05-2015
Ultra-sensitive self-powered position-sensitive detector based on horizontally-aligned double 3C-SiC/Si heterostructures
Publisher: Elsevier BV
Date: 2021
Design and simulation of convective inertial sensor
Publisher: IEEE
Date: 11-2008
Micro force-Moment sensor with six-Degree of freedom
Publisher: IEEE
Date: 2001
Design and Simulation of Piezoresistive Micro Accelerometers for Wearable Sensing Applications
Publisher: IEEE
Date: 11-2008
A micro gearing system based on a ratchet mechanism and electrostatic actuation
Publisher: Springer Science and Business Media LLC
Date: 18-07-2013
Self-powered monolithic accelerometer using a photonic gate
Publisher: Elsevier BV
Date: 10-2020
Development of PZT Actuated Valveless Micropump
Publisher: MDPI AG
Date: 24-04-2018
DOI: 10.3390/S18051302
Technical program committee (TPC)
Publisher: IEEE
Date: 12-2014
Piezoelectric MEMS low-level vibration energy harvester with PMN-PT single crystal cantilever
Publisher: Institution of Engineering and Technology (IET)
Date: 2012
DOI: 10.1049/EL.2012.1419
Single mask, simple structure micro rotational motor driven by electrostatic comb-drive actuators
Publisher: IOP Publishing
Date: 20-12-2011
Advances in Rational Design and Materials of High‐Performance Stretchable Electromechanical Sensors
Publisher: Wiley
Date: 26-02-2020
High Power and Reliable SPST/SP3T RF MEMS Switches for Wireless Applications
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 09-2016
A MEMS-based microsensor to measure all six components of force and moment on a near-wall particle in turbulent flow
Publisher: IEEE
Date: 2003
Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology
Publisher: IOP Publishing
Date: 03-2010
Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology
Publisher: Elsevier BV
Date: 08-2018
Study on contact resistance in single-contact and multi-contact MEMS switches
Publisher: Elsevier BV
Date: 03-2015
Measuring the Coefficient of Friction of a Small Floating Liquid Marble
Publisher: Springer Science and Business Media LLC
Date: 02-12-2016
DOI: 10.1038/SREP38346
Abstract: This paper investigates the friction coefficient of a moving liquid marble, a small liquid droplet coated with hydrophobic powder and floating on another liquid surface. A floating marble can easily move across water surface due to the low friction, allowing for the transport of aqueous solutions with minimal energy input. However, the motion of a floating marble has yet to be systematically characterised due to the lack of insight into key parameters such as the coefficient of friction between the floating marble and the carrier liquid. We measured the coefficient of friction of a small floating marble using a novel experimental setup that exploits the non-wetting properties of a liquid marble. A floating liquid marble pair containing a minute amount magnetite particles were immobilised and then released in a controlled manner using permanent magnets. The capillarity-driven motion was analysed to determine the coefficient of friction of the liquid marbles. The “capillary charge” model was used to fit the experimental results. We varied the marble content and carrier liquid to establish a relationship between the friction correction factor and the meniscus angle.
Fabrication of a PMMA torsional micromirror device based on hot embossing process
Publisher: IEEE
Date: 11-2008
Micro ratcheting transmission systems based on electrostatic actuator
Publisher: IEEE
Date: 11-2008
Highly-sensitive Dual-fluorescence Detection and Imaging with Integrated Dual-color Total Internal Reflection (TIR)-based Chip
Publisher: IEEE
Date: 11-2008
Thermoresistive Effect for Advanced Thermal Sensors: Fundamentals, Design Considerations, and Applications
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 10-2017
Piezoresistive Effect with a Gauge Factor of 18 000 in a Semiconductor Heterojunction Modulated by Bonded Light-Emitting Diodes
Publisher: American Chemical Society (ACS)
Date: 08-07-2021
Lithography and Etching‐Free Microfabrication of Silicon Carbide on Insulator Using Direct UV Laser Ablation
Publisher: Wiley
Date: 06-02-2020
Longitudinal strain sensitive effect in a photonic crystal cavity
Publisher: Elsevier BV
Date: 2011
All PDMS multi-color total internal reflection (TIR)-based devices for multi-fluorescence detection and imaging
Publisher: IEEE
Date: 10-2009
Giant Piezotronic Effect by Photoexcitation–Electronic Coupling in a p-GaN/AlGaN/GaN Heterojunction
Publisher: American Chemical Society (ACS)
Date: 08-06-2022
NEMS accelerometers with nanoscale sensing elements
Publisher: IEEE
Date: 11-2010
Real gas model for an electric swashplate refrigeration compressor,Modèle de gaz réel pour un compresseur frigorifique à plateau oscillant électrique
Publisher: Elsevier BV
Date: 10-2020
Onset of thermomagnetic convection around a vertically oriented hot-wire in ferrofluid
Publisher: Elsevier BV
Date: 06-2018
Analytical and experimental investigation of the parameters in drilling flax/poly(lactic acid) bio-composite laminates
Publisher: Springer Science and Business Media LLC
Date: 07-2020
Effect of Drilling Parameters on Delamination and Hole Quality in Drilling Flax Fiber Reinforced Bio-Composites
Publisher: Springer International Publishing
Date: 12-2018
Pushing the Limits of Piezoresistive Effect by Optomechanical Coupling in 3C-SiC/Si Heterostructure
Publisher: American Chemical Society (ACS)
Date: 07-11-2017
Abstract: This letter reports a giant opto-piezoresistive effect in p-3C-SiC -Si heterostructure under visible-light illumination. The p-3C-SiC -Si heterostructure has been fabricated by growing a 390 nm p-type 3C-SiC on a p-type Si substrate using the low pressure chemical vapor deposition (LPCVD) technique. The gauge factor of the heterostructure was found to be 28 under a dark condition however, it significantly increased to about -455 under illumination of 635 nm wavelength at 3.0 mW/cm
Design and analysis of an integrated 3-DOF sensor for tracking in-plane motion
Publisher: IEEE
Date: 11-2013
A micro transportation system (MTS) with large movement of containers driven by electrostatic comb-drive actuators
Publisher: IOP Publishing
Date: 21-09-2007
Experimental investigation of resonant MEMS switch with ac actuation
Publisher: AIP Publishing
Date: 20-06-2016
DOI: 10.1063/1.4954262
Abstract: In this letter, modeling, analysis, and experimental investigation for a resonant MEMS switch are presented. The resonant switch harnesses its mechanical resonance to lower the required actuation voltage by a substantial factor over the switch with static actuation. With alternating actuation voltage at its mechanical resonance frequency of 6.6 kHz, the average capacitance is tuned by changing the gap between fixed and movable electrodes. Based on the proposed actuation method, the device offers 57.44% lower actuation voltage compared with the switch with static actuation.
Charge-Reduced Particles via Self-Propelled Electrohydrodynamic Atomization for Drug Delivery Applications
Publisher: American Chemical Society (ACS)
Date: 15-06-2023
A Novel Bidirectional Z-Shaped Thermally Actuated RF MEMS Switch for Multiple-Beam Antenna Array
Publisher: Trans Tech Publications, Ltd.
Date: 06-2013
DOI: 10.4028/WWW.SCIENTIFIC.NET/AMR.705.264
Abstract: In this paper RF MEMS switchis designed for dielectric-embedded electronically switched multiple-beam (DE-ESMB) antenna array. To achieve small stiffness without buckling, a novel bidirectional Z-shaped thermal actuator is used instead of V-shaped thermal actuator, which can generate large displacement and high contact force at low actuation voltage. With the actuation current from-0.6 A to 0.6 A, the electrothermal actuator can achieve a bidirectional motion in a dynamic range of-10.08 μm to 10.17 μm.RF performances are improved by suspending the structure 25 μm from the substrate using MetalMumps process. An ON state insertion loss of-0.14 dB at 10 GHz and an OFF state isolation of-67 dB at 10 GHz are achieved on low resistivity silicon substrate.
Bulk PZT thick film preparation on silicon wafer and its application for MEMS power generator
Publisher: Trans Tech Publications, Ltd.
Date: 11-2011
DOI: 10.4028/WWW.SCIENTIFIC.NET/MSF.663-665.1115
Abstract: The paper reports on the PZT thick films preparation method by bonding bulk PZT on Si and then lapping PZT to suitable thicknesses. Epoxy resins with preferable thermostability were used as the intermediate adhesive layer in bonding process. A tight bonding of more than 10MPa was attained at suitable gradient bonding temperatures in an oven which were from 30 oC up to 105 oC according to 15 oC per thirty minutes and holding for more than 3h at 105 oC, and a pressure of more than 0.05MPa. Some properties of the prepared PZT thick films were tested. Finally, a piezoelectric MEMS power generator was fabricated by using the described techniques of PZT thick films preparation on silicon. The maximum output voltage under the resonant operation was measured.
Active demultiplexing of single photons from a solid-state source
Publisher: Wiley
Date: 11-04-2017
Convective gas gyroscope based on thermo-resistive effect in SI p-n junction
Publisher: IEEE
Date: 06-2007
Development of polymer MEMS process technology as an approach to a sustainable production system
Publisher: IOP Publishing
Date: 03-2012
DOI: 10.1088/2043-6262/3/1/015009
Abstract: Polymethyl methacrylate (PMMA) has been proposed as a material for micro-electromechanical systems (MEMS) to initiate the research on environmentally friendly micro-nano machining technology using polymer materials. A polymer MEMS process has been developed using hot embossing and precision machining. MEMS structures less than 2 μm were successfully embossed. The PMMA layer that remained after hot embossing was removed by a polishing process to release the movable parts. A PMMA electrostatic comb-drive microactuator was fabricated. Both finger width and gap between fingers were 5 μ m , and thickness was larger than 70 μ m . An operated displacement of 11 μ m at a drive voltage of 100 V was obtained. It was 20 times larger than that of an identical silicon device. A torsional micro mirror device driving with vertical comb actuator was fabricated. The size of the mirror was 1×1 mm 2 . The maximum tilt angle of 5.6 was obtained with driving voltage of 100 V and frequency up to 100 Hz. A chevron-shaped PMMA thermal actuator with a thickness of about 50 μ m has been fabricated and tested successfully. The displacement was about 5 times larger than that of a Si counterpart at the same power consumption.
Dielectrophoretic Trapping of a Floating Liquid Marble
Publisher: American Physical Society (APS)
Date: 18-04-2019
Strain Sensitive Effect in a Triangular Lattice Photonic Crystal Hole-Modified Nanocavity
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 11-2011
Highly-sensitive fluorescence detection and imaging with microfabricated total internal reflection (TIR)-based devices
Publisher: Springer Science and Business Media LLC
Date: 31-08-2012
Development of fabrication process for large-displacement polymer MEMS with stacked movable structures based on hot embossing and polishing
Publisher: Japan Institute of Electronics Packaging
Date: 2011
DOI: 10.5104/JIEP.14.507
Electrically Stable Carbon Nanotube Yarn Under Tensile Strain
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 09-2017
Study on an efficient fabrication process for PMMA movable microstructures based on hot embossing and polishing processes
Publisher: IEEE
Date: 11-2009
Design Optimization of MEMS Based LLC Tunable Resonant Converter for Power Supplies on Chip
Publisher: Trans Tech Publications, Ltd.
Date: 06-2013
DOI: 10.4028/WWW.SCIENTIFIC.NET/AMR.705.258
Abstract: In this paper, a novel MEMS based LLC converter is proposed for on chip power supplies. The design is optimized based on commercially available Metal MUMPs process for fabrication. The resonant frequency is optimized at 20MHz and MEMS based variable capacitor is fabricated on the chip to tune the peak resonance frequency of circuit which varies due to the load variations. The Design is simulated in FEM based numerical software COMSOL and Intellisuite. According to analysis the magnetizing inductance of 42nH and leakage inductance of 40nH has been achieved from 16 mm 2 rectangular coil transformer. The total capacitance of 1500pF has been achieved from parallel plate capacitors and variation of 3pF has been achieved from variable capacitor.
Fabrication and analysis of high-performance piezoelectric MEMS generators
Publisher: IOP Publishing
Date: 17-05-2012
Development and Analysis of a Sliding Tactile Soft Fingertip Embedded With a Microforce/Moment Sensor
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 06-2011
RF MEMS switches for smart antennas
Publisher: Springer Science and Business Media LLC
Date: 17-02-2014
Fabrication of optically smooth, through-wafer silicon molds for PDMS total internal reflection-based devices
Publisher: Springer Science and Business Media LLC
Date: 22-08-2009
In-air particle generation by on-chip electrohydrodynamics
Publisher: Royal Society of Chemistry (RSC)
Date: 2021
DOI: 10.1039/D0LC01247E
Abstract: This work demonstrates the capability of simultaneously generating-and-delivering a stream of micro/nanoparticles range of 0.75–2 μm by electrohydrodynamics, without any restrictions of either the collector or the assistance of external flow.
Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures
Publisher: Elsevier BV
Date: 10-2018
Transparent crystalline cubic SiC-on-glass electrodes enable simultaneous electrochemistry and optical microscopy
Publisher: Royal Society of Chemistry (RSC)
Date: 2019
DOI: 10.1039/C9CC03082D
Abstract: This work introduces transparent SiC-on-glass as a new platform for biosensing applications which enables cell culturing, stimulating, microscopy-imaging and bioelectrochemical detection.
Design and fabrication of a convective 3-DOF angular rate sensor
Publisher: IEEE
Date: 2007
Fabrication and characterization of silicon micro mirror with CNT hinge
Publisher: IEEE
Date: 2011
RFID assisted Flexible Manufacturing System
Publisher: IEEE
Date: 12-2013
Numerical simulation of combined natural and thermomagnetic convection around a current carrying wire in ferrofluid
Publisher: Elsevier BV
Date: 11-2019
Hydrogen sensor based on palladium-yttrium alloy nanosheet
Publisher: Elsevier BV
Date: 06-2017
Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology
Publisher: Springer Science and Business Media LLC
Date: 29-01-2014
Investigation of strain sensing effect in modified single-defect photonic crystal nanocavity
Publisher: The Optical Society
Date: 21-04-2011
DOI: 10.1364/OE.19.008821
Accurate dielectrophoretic positioning of a floating liquid marble with a two-electrode configuration
Publisher: Springer Science and Business Media LLC
Date: 03-06-2019
Integrated photonic platform for quantum information with continuous variables
Publisher: American Association for the Advancement of Science (AAAS)
Date: 07-12-2018
Abstract: An integrated optical chip is used for generating, manipulating, and detecting squeezed vacuum and two-mode entanglement.
Development of micro motion sensors based on piezoresistive and thermo-resistive effects in silicon
Publisher: SPIE
Date: 28-12-2006
DOI: 10.1117/12.638380
Critical Trapping Conditions for Floating Liquid Marbles
Publisher: American Physical Society (APS)
Date: 02-01-2020
Simulation and Fabrication of a Convective Gyroscope
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 09-2008
Ultrahigh-sensitive WO3 nanosensor with interdigitated Au nano-electrode for NO2 detection
Publisher: Elsevier BV
Date: 05-2008
Application of an Integrated Microfluidic Total Internal Reflection (TIR)-based Chip to Nano-Particle Image Velocimetry (nano-PIV)
Publisher: IEEE
Date: 2007
Coalescence processes of droplets and liquid marbles
Publisher: MDPI AG
Date: 20-11-2017
DOI: 10.3390/MI8110336
A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator
Publisher: IOP Publishing
Date: 12-06-2013
Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements
Publisher: Elsevier BV
Date: 03-2007
Palladium on paper as a low-cost and flexible material for fast hydrogen sensing
Publisher: Springer Science and Business Media LLC
Date: 20-02-2020
Draft genome sequence of strain HIMB100, a cultured representative of the SAR116 clade of marine Alphaproteobacteria
Publisher: Springer Science and Business Media LLC
Date: 23-12-2011
DOI: 10.4056/SIGS.1854551
Vibration analysis of initially curved single walled carbon nanotube with vacancy defect for ultrahigh frequency nanoresonators
Publisher: Springer Science and Business Media LLC
Date: 20-02-2016
Degraded boiling heat transfer from hotwire in ferrofluid due to particle deposition
Publisher: Elsevier BV
Date: 09-2018
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