ORCID Profile
0000-0001-5760-7485
Current Organisation
IMEC
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Publisher: SPIE
Date: 26-02-2020
DOI: 10.1117/12.2540934
Publisher: Springer Science and Business Media LLC
Date: 2016
DOI: 10.1557/ADV.2016.22
Publisher: IEEE
Date: 10-2021
Publisher: Optica Publishing Group
Date: 18-05-2022
DOI: 10.1364/OME.457589
Abstract: Low-power and compact phase shifters are crucial for large photonic circuits, both to cope with variability and to create programmable waveguide circuits scaling to thousands of tuning elements. This work demonstrates a liquid crystal phase shifter where there is a lateral silicon electrode "rail" on one side of the waveguide core. Using this architecture, a strong quasi-static electric field E actuation can be applied over the gap, which is filled with liquid crystal cladding material, with modest voltages. Because the mode is largely confined in the waveguide, optical losses are limited, compared to earlier experiments with slot waveguides. The liquid crystal is deposited locally on three different device variations using inkjet printing. The local deposition avoids unwanted interference of the liquid crystal with other optical components such as grating couplers. Measurements show similar trends as simulations of the liquid crystal orientations. For one device with a length of 50 µm , a phase shift of almost 0.9 π is shown at 10 V RMS . We also discuss the challenges with this first demonstration of this phase shifter geometry using a silicon side-rail as an electrode.
Publisher: Springer Science and Business Media LLC
Date: 20-03-2023
DOI: 10.1038/S41378-023-00498-Z
Abstract: Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing, and quantum information processing. The success of silicon photonics has been enabled by the unique combination of performance, high yield, and high-volume capacity that can only be achieved by standardizing manufacturing technology. Today, standardized silicon photonics technology platforms implemented by foundries provide access to optimized library components, including low-loss optical routing, fast modulation, continuous tuning, high-speed germanium photodiodes, and high-efficiency optical and electrical interfaces. However, silicon’s relatively weak electro-optic effects result in modulators with a significant footprint and thermo-optic tuning devices that require high power consumption, which are substantial impediments for very large-scale integration in silicon photonics. Microelectromechanical systems (MEMS) technology can enhance silicon photonics with building blocks that are compact, low-loss, broadband, fast and require very low power consumption. Here, we introduce a silicon photonic MEMS platform consisting of high-performance nano-opto-electromechanical devices fully integrated alongside standard silicon photonics foundry components, with wafer-level sealing for long-term reliability, flip-chip bonding to redistribution interposers, and fibre-array attachment for high port count optical and electrical interfacing. Our experimental demonstration of fundamental silicon photonic MEMS circuit elements, including power couplers, phase shifters and wavelength- ision multiplexing devices using standardized technology lifts previous impediments to enable scaling to very large photonic integrated circuits for applications in telecommunications, neuromorphic computing, sensing, programmable photonics, and quantum computing.
Publisher: Optica Publishing Group
Date: 2021
Abstract: Stimulated Brillouin Scattering (SBS) is demonstrated on a standard active silicon photonics platform, the forward SBS gain and opto-mechanical coupling rates are calculated for two different rib waveguide geometries.
Publisher: IEEE
Date: 12-2021
Publisher: Optica Publishing Group
Date: 14-01-2022
DOI: 10.1364/PRJ.441215
Abstract: The emerging fields of silicon (Si) photonic micro–electromechanical systems (MEMS) and optomechanics enable a wide range of novel high-performance photonic devices with ultra-low power consumption, such as integrated optical MEMS phase shifters, tunable couplers, switches, and optomechanical resonators. In contrast to conventional SiO 2 -clad Si photonics, photonic MEMS and optomechanics have suspended and movable parts that need to be protected from environmental influence and contamination during operation. Wafer-level hermetic sealing can be a cost-efficient solution, but Si photonic MEMS that are hermetically sealed inside cavities with optical and electrical feedthroughs have not been demonstrated to date, to our knowledge. Here, we demonstrate wafer-level vacuum sealing of Si photonic MEMS inside cavities with ultra-thin caps featuring optical and electrical feedthroughs that connect the photonic MEMS on the inside to optical grating couplers and electrical bond pads on the outside. We used Si photonic MEMS devices built on foundry wafers from the iSiPP50G Si photonics platform of IMEC, Belgium. Vacuum confinement inside the sealed cavities was confirmed by an observed increase of the cutoff frequency of the electro-mechanical response of the encapsulated photonic MEMS phase shifters, due to reduction of air d ing. The sealing caps are extremely thin, have a small footprint, and are compatible with subsequent flip-chip bonding onto interposers or printed circuit boards. Thus, our approach for sealing of integrated Si photonic MEMS clears a significant hurdle for their application in high-performance Si photonic circuits.
Publisher: Optica Publishing Group
Date: 2021
DOI: 10.1364/CLEO_SI.2021.STH1Q.4
Abstract: Photonic integrated circuits are becoming increasingly more complex, especially with the emergence of programmable photonic circuits. These require many tunable photonic elements, such as electro-optic phase shifters and tunable couplers. We will discuss our progress in compact, low-power silicon photonics actuators based on heaters, liquid crystal and MEMS that can be scaled up to large circuits.
Publisher: Optica Publishing Group
Date: 08-02-2023
DOI: 10.1364/OE.480219
Abstract: Ring resonators are a vital element for filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of round-trip phase and coupling using low-power microelectromechanical (MEMS) actuation. At a wavelength of 1540 nm and for a maximum voltage of 40 V, the phase shifters provide a resonance wavelength tuning of 0.15 nm, while the tunable couplers can tune the optical resonance extinction ratio at the through port from 0 to 30 dB. The optical resonance displays a passive quality factor of 29 000, which can be increased to almost 50 000 with actuation. The MEMS rings are in idually vacuum-sealed on wafer scale, enabling reliable and long-term protection from the environment. We cycled the mechanical actuators for more than 4 × 10 9 cycles at 100 kHz, and did not observe degradation in their response curves. On mechanical resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4 V and a peak drive litude as low as 20 mV.
Publisher: The Optical Society
Date: 27-02-2017
DOI: 10.1364/OE.25.005244
Publisher: SPIE
Date: 26-05-2022
DOI: 10.1117/12.2631231
Publisher: Optica Publishing Group
Date: 10-11-2021
DOI: 10.1364/OL.436288
Abstract: Programmable photonic integrated circuits are emerging as an attractive platform for applications such as quantum information processing and artificial neural networks. However, current programmable circuits are limited in scalability by the lack of low-power and low-loss phase shifters in commercial foundries. Here, we demonstrate a compact phase shifter with low-power photonic microelectromechanical system (MEMS) actuation on a silicon photonics foundry platform (IMEC’s iSiPP50G). The device attains ( 2.9 π ± π ) phase shift at 1550 nm, with an insertion loss of ( 0.33 − 0.10 + 0.15 ) d B , a V π of ( 10.7 − 1.4 + 2.2 ) V , and an L π of ( 17.2 − 4.3 + 8.8 ) µ m . We also measured an actuation bandwidth f − 3 d B of 1.03 MHz in air. We believe that our demonstration of a low-loss and low-power photonic MEMS phase shifter implemented in silicon photonics foundry compatible technology lifts a main roadblock toward the scale-up of programmable photonic integrated circuits.
Publisher: Optica Publishing Group
Date: 2021
DOI: 10.1364/IPRSN.2021.IM2A.1
Abstract: We present a silicon photonics technology extended with low-power MEMS scalable to large circuits. This enables us to make photonic waveguide meshes that can be reconfigured using electronics and software.
Publisher: IEEE
Date: 09-01-2022
Publisher: Optica Publishing Group
Date: 2022
DOI: 10.1364/CLEO_SI.2022.SF4M.5
Abstract: Applications of silicon photonics range from sensing to microwave processing. However, low-power active filters with long FSRs are lacking. We demonstrate an add-drop ring filter with 4 nm FSR and nW-level MEMS tuning of phase and coupling.
Location: United Kingdom of Great Britain and Northern Ireland
No related grants have been discovered for Muhammad Umar Khan.