ORCID Profile
0000-0003-3697-5750
Current Organisations
自然科学研究機構国立天文台/National Astronomical Observatory of Japan
,
University of Twente
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Publisher: Optica Publishing Group
Date: 28-04-2022
DOI: 10.1364/OE.456834
Abstract: Silicon nitride (SiN) waveguides need to be thick to show low dispersion which is desired for nonlinear applications. However, high quality thick SiN produced by chemical vapour deposition (CVD) contains high internal stress, causing it to crack. Crack-free wafers with thick SiN can be produced by adding crack barriers. We demonstrate the use of dicing trenches as a simple single-step method to produce high quality (loss .5 dB / cm ) crack-free SiN. We show Kerr-comb generation in a ring resonator to highlight the high quality and low dispersion of the waveguides.
Publisher: Public Library of Science (PLoS)
Date: 20-07-2012
Publisher: Elsevier BV
Date: 11-2014
Publisher: American Astronomical Society
Date: 11-2020
Publisher: Elsevier BV
Date: 05-2000
Publisher: American Astronomical Society
Date: 29-10-2021
Location: Japan
Location: United Kingdom of Great Britain and Northern Ireland
No related grants have been discovered for Herman Offerhaus.