ORCID Profile
0000-0002-8595-5580
Current Organisation
Instituto de Microelectrónica de Barcelona (IMB-CNM) CSIC
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Publisher: AIP Publishing
Date: 15-01-2006
DOI: 10.1063/1.2164537
Abstract: Thermomechanical noise determines the lowest detection limits of microcantilever-based devices for measuring forces and surface stress variations. In this work, arrays of 334-nm-thick single-crystalline silicon microcantilevers with dissimilar lengths and widths from 50to500μm and 20to200μm, respectively, have been fabricated to calculate the minimal detectable force and surface stress on the basis of the measurement of the spring constant, resonance frequency, and quality factor. The calculated minimal detectable force and surface stress are of the orders of 10−15NHz−1∕2 and 10−7Nm−1Hz−1∕2, respectively, and both follow a nonintuitive dependence on the dimensions. The minimal detectable force decreases as the cantilevers are shorter and narrower, whereas the minimal detectable surface stress decreases by making the cantilevers shorter and wider. Theoretical expressions of the minimal detectable force and surface stress are provided as a function of the material properties, cantilever dimensions, and quality factor, which allow us to interpret the results. Both force and surface stress noises follow the same dependence on the quality factor and material properties, however, exhibit striking differences in the dimension dependences. The force and surface stress noises enhance with the quality factor. If the quality factor is kept constant, the force noise enhances as the cantilever is longer and wider, whereas the surface stress noise enhances by making the cantilever shorter and wider. The observed increase of the force noise with the length is attributed to the strong decrease of the quality factor. The results imply that the design of cantilevers for surface stress measurements in general should be different than for atomic force microscopy probes.
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Date: 05-2006
Publisher: AIP Publishing
Date: 11-09-2017
DOI: 10.1063/1.5003023
Abstract: Mechanically coupled resonators have been applied in the last years to the development of nanomechanical mass-sensors based on the detection of the different vibration modes of the system by measuring on a single resonator. Their sensitivity and capability for detecting multiple analytes strongly depends on the design and coupling strength between the mechanically coupled resonators in an array format. We present a theoretical and experimental study of the behavior of an asymmetrically coupled array of four different resonators. These doubly cl ed beam resonators are elastically coupled by an overhang region of varying length along the transversal axis of the array. The results show that parameters such as the gap between microbeams and the overhang length affect the coupling strength, tuning the system from highly disordered and highly localized (weak coupling) to highly delocalized (strong coupling). In the strong coupling and partially localized case, the distances between resonant peaks are larger, reaching higher eigenfrequency values. In this case, relative changes in a specific eigenstate, due to an added mass, can be markedly large due to the energy distribution over a single microbeam. A strong coupling also facilitates performing the detection on the relative frequency shift mode, which can usually be resolved with better precision than the litude changes.
Publisher: Optica Publishing Group
Date: 10-01-2006
DOI: 10.1364/AO.45.000229
Abstract: By measuring the excitation efficiency of an optical waveguide on a diffraction grating one can accurately register the changes in the incidence angle of the exciting light beam. This phenomenon was applied to detect ultrasmall deflections of silicon dioxide cantilevers of submicrometer thickness that were fabricated with corrugation on top to act as diffraction grating couplers. The power of light coupled into the cantilevers was monitored with a conventional photodetector and modulated using mechanical vibration of the cantilever, thus changing the spatial orientation of the coupler with respect to the incident light beam. The technique can be considered as an alternative to the methods known for detection of cantilever deflection.
Publisher: AIP Publishing
Date: 28-08-2006
DOI: 10.1063/1.2345234
Abstract: The authors have designed and fabricated arrays of microcantilevers with a geometry that shows reduced initial angular offset and angle deviation between the cantilevers of the array. This feature allows to detect the displacement of the cantilevers using the optical beam deflection technique and a single split photodetector. The structure is analytically and numerically simulated to demonstrate its feasibility. In addition, experimental measurements of the angle offset corroborate the offset and the angle deviation reduction. Finally, they illustrate the potential of these micromechanical structures as sensors by measuring a monolayer of single stranded DNA.
Publisher: SPIE
Date: 21-04-2006
DOI: 10.1117/12.662393
Publisher: SPIE
Date: 25-11-0088
DOI: 10.1117/12.698176
Publisher: American Chemical Society (ACS)
Date: 31-03-2022
Publisher: Frontiers Media SA
Date: 12-12-2016
Publisher: Humana Press
Date: 2009
DOI: 10.1007/978-1-60327-569-9_4
Abstract: Microcantilevers based-biosensors are a new label-free technique that allows the direct detection of biomolecular interactions in a label-less way and with great accuracy by translating the biointeraction into a nanomechanical motion. Low cost and reliable standard silicon technologies are widely used for the fabrication of cantilevers with well-controlled mechanical properties. Over the last years, the number of applications of these sensors has shown a fast growth in erse fields, such as genomic or proteomic, because of the biosensor flexibility, the low s le consumption, and the non-pretreated s les required. In this chapter, we report a dedicated design and a fabrication process of highly sensitive microcantilever silicon sensors. We will describe as well an application of the device in the environmental field showing the immunodetection of an organic toxic pesticide as an ex le. The cantilever biofunctionalization process and the subsequent pesticide determination are detected in real time by monitoring the nanometer-scale bending of the microcantilever due to a differential surface stress generated between both surfaces of the device.
Publisher: Elsevier BV
Date: 10-2006
Location: Spain
No related grants have been discovered for Jose A Plaza.