ORCID Profile
0000-0003-2409-9343
Current Organisation
KU Leuven
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Publisher: American Chemical Society (ACS)
Date: 24-12-2008
DOI: 10.1021/JA8066572
Abstract: Spin-on zeolite films deposited from Silicalite-1 nanocrystal suspensions prepared by hydrothermal treatment of clear solutions have the required properties for insulating media in microelectronics. However, on the scale of the feature sizes in on-chip interconnects of a few tens of nanometers, their homogeneity is still insufficient. We discovered a way to overcome this problem by combining the advantages of the clear solution approach of Silicalite-1 synthesis with a sol-gel approach. A combination of tetraethyl orthosilicate and methyltrimethoxysilane silica sources was hydrolyzed and cocondensed in the presence of an aqueous tetraalkylammonium hydroxide template. The resulting suspension of nanoparticles of a few nanometers in size together with residual oligomeric silica species were spun onto support. The final zeolite-inspired low-k films (ZLK) with respect to pore size and homogeneity satisfied all requirements and presented excellent hydrophobicity, stiffness, and dielectric constant. The size and content of initially formed nanoparticles and the spatial hindrance promoted by occluded tetraalkylammonium molecules were found to be crucial elements in the definition of the final pore network.
Publisher: Elsevier BV
Date: 02-2009
Publisher: The Electrochemical Society
Date: 2008
DOI: 10.1149/1.2885041
Publisher: Wiley
Date: 14-08-2008
Publisher: The Electrochemical Society
Date: 2008
DOI: 10.1149/1.2971025
Publisher: American Chemical Society (ACS)
Date: 22-11-2007
DOI: 10.1021/LA7028388
Abstract: Ellipsometric porosimetry was used to determine the adsorption isotherms of toluene, methanol, and water on b-oriented Silicalite-1 coatings with a thickness of less than ca. 250 nm and to obtain adsorption kinetics. The adsorption isotherms are of sufficient quality to reveal several aspects of the pore structure such as the adsorbate capacity and the adsorbate/framework affinity. The use of a combination of different molecular probes in ellipsometric porosimetry to elucidate the molecular accessibility of Silicalite-1 pores is demonstrated. It is shown that ellipsometric porosimetry is an appropriate technique for probing the influence of aging of the Silicalite-1 coating and of planarization polishing on the porosity, pore accessibility, and adsorbate/framework affinity.
Publisher: Royal Society of Chemistry (RSC)
Date: 2014
DOI: 10.1039/C4RA12460J
Abstract: Kinetic separation of CO 2 from CH 4 over rubidium or cesium-exchanged ZK-5 (KFI) zeolites for upgrade of biogas to renewable fuels.
Publisher: American Chemical Society (ACS)
Date: 30-01-2007
DOI: 10.1021/CM0527219
Publisher: American Chemical Society (ACS)
Date: 11-07-2007
DOI: 10.1021/JA0723737
Publisher: American Chemical Society (ACS)
Date: 05-04-2008
DOI: 10.1021/LA800086Y
Abstract: We present a study on the hydrophobization of spin-on Silicalite-1 zeolite films through silylation with trimethylchlorosilane. Microporous and micro-mesoporous Silicalite-1 films were synthesized by spin coating of suspensions of Silicalite-1 nanozeolite crystallized for different times. Ellipsometric porosimetry with toluene and water adsorbates reveals that silylation decreases the porosity and makes the films hydrophobic. The decrease in porosity depends on the exposed surface area in the pores. Water contact angle measurements confirm the hydrophobicity. Fourier transform infrared spectroscopy reveals that the trimethylsilyl groups are chemisorbed selectively on isolated silanols and less on geminal and vicinal silanols due to steric limitations. Time-of-flight secondary-ion mass spectroscopy and in situ ellipsometry analysis of the reaction kinetics show that the silylation is a bulk process occurring in the absence of diffusion limitation. Electrical current leakage on films decreases upon silylation. Silylation with trimethylchlorosilane is shown to be an effective hydrophobization method for spin-on Silicalite-1 zeolite films.
Publisher: Elsevier
Date: 2007
No related grants have been discovered for Christine Eva Antonia Kirschhock.