ORCID Profile
0000-0002-5091-6362
Current Organisation
Nanyang Technological University
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Publisher: Elsevier BV
Date: 10-2010
Publisher: Springer Science and Business Media LLC
Date: 07-2006
Publisher: Elsevier BV
Date: 08-2010
Publisher: Elsevier BV
Date: 03-2016
Publisher: IOP Publishing
Date: 27-06-2006
Publisher: Elsevier BV
Date: 04-2009
Publisher: Elsevier BV
Date: 11-2005
Publisher: Elsevier BV
Date: 05-2008
Publisher: IEEE
Date: 2005
Publisher: Taiwan Association for Aerosol Research
Date: 2012
Publisher: Wiley
Date: 24-05-2011
Publisher: Royal Society of Chemistry (RSC)
Date: 2010
DOI: 10.1039/C0NR00159G
Abstract: Uniform SnO(2) nanorod arrays were deposited on a 4 inch SiO(2)/Si wafer by plasma-enhanced chemical vapor deposition (PEVCD) at low deposition temperature of around 300 degrees C. The SnO(2) nanorods were connected at the roots, thus the nanorod sensors could be fabricated by a feasible way compatible with microelectronic processes. The surface of the sensors was modified by Pt nanoparticles deposited by dip coating and sputtering, respectively. The sensing properties of the Pt-modified SnO(2) nanorod sensors to CO and H(2) gases were comparatively studied. After surface modification of Pt, the sensing response to CO and H(2) gases increased dramatically. The 2 nm Pt-modified SnO(2) nanorod sensors by sputtering showed the best sensing performance. By increasing Pt thickness from 2 nm up to 20 nm, the optimal working temperature decreased by 30 degrees C while the sensing response also decreased by about 4 times. Comparing these two Pt modification approaches by dip coating and sputtering, both could achieve comparable promotion effect if the Pt thickness can be controlled around its optimal value. The deposition technique of SnO(2) nanorod arrays by PECVD has good potential for scale-up and the fabrication process of nanorod sensors possesses simplicity and good compatibility with contemporary microelectronics-based technology.
Publisher: IOP Publishing
Date: 10-01-2006
No related grants have been discovered for Ooi Kiang Tan.