ORCID Profile
0000-0002-4525-3939
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Publisher: Optica Publishing Group
Date: 12-2008
Publisher: Springer Netherlands
Date: 2009
Publisher: American Physical Society (APS)
Date: 06-02-2009
Publisher: Springer Science and Business Media LLC
Date: 20-01-2008
Publisher: OSA
Date: 2009
Publisher: IEEE
Date: 05-2008
Publisher: AIP
Date: 2007
DOI: 10.1063/1.2768844
Publisher: IEEE
Date: 05-2007
Publisher: Optica Publishing Group
Date: 27-02-2008
DOI: 10.1364/OL.33.000491
Abstract: We report a dramatic improvement of the spatial coherence and beam ergence (0.66 mrad) of a 13.2 nm wavelength Ni-like Cd tabletop laser by injection seeding the soft x-ray laser lifier with high-harmonics pulses generated in a Ne gas jet. This phase coherent laser is an attractive light source for at-wavelength interferometry of extreme ultraviolet lithography optics and other applications.
Publisher: IEEE
Date: 05-2007
Publisher: American Physical Society (APS)
Date: 18-09-2006
Publisher: SPIE
Date: 13-09-2007
DOI: 10.1117/12.734285
No related grants have been discovered for Mark Berrill.