Linkage Projects - Grant ID: LP120100161

Funding Activity

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Funded Activity Summary

Three dimensional nano-lithography: combined electron and ion beam fabrication. By adding one more dimension to a planar (hence two dimensional - 2D) lithography, it will become possible to structure and texture materials in three dimensions (3D) by combining electron beam lithography (2D) and ion beam milling (3D) with the highest precision of several nanometres. This will open new applications in photonics and sensing.

Funded Activity Details

Start Date: 01-01-2012

End Date: 06-05-2015

Funding Scheme: Linkage Projects

Funding Amount: $90,453.00

Funder: Australian Research Council