Linkage Projects - Grant ID: LP0348965

Funding Activity

Website
http://dataportal.arc.gov.au/NCGP/Web/Grant/Grant/LP0348965

Funding Status
Closed

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Funded Activity Summary

Development of inert gas ion beams for fabrication of nano-structures. This project will develop a high brightness, high density ion beam for reactive fabrication of structures with dimensions of the order of and less than 100 nano-metres. Present systems use liquid metal ion sources which can pollute the substrates being fabricated. Use of inert gas ions will overcome this problem and lead to a new type of ion source to replace the older systems. Added advantages include significantly increased lifetime much higher reproducibility. Our commercial collaborator, FEI Company, estimate the world market as being $US100,000,000 and will actively promote this technology worldwide when it is fully developed.

Funded Activity Details

Start Date: 18-12-2003

End Date: 17-12-2006

Funding Scheme: Linkage Projects

Funding Amount: $300,000.00

Funder: Australian Research Council

Research Topics

ANZSRC Field of Research (FoR)

Manufacturing Engineering Not Elsewhere Classified | Manufacturing Engineering | Integrated Circuits | Plasmas And Electrical Discharges

ANZSRC Socio-Economic Objective (SEO)

Integrated circuits and devices | Physical sciences | Scientific instrumentation |

Other Keywords

Integrated Circuits | Integrated circuits and devices | Manufacturing Engineering | Manufacturing Engineering Not Elsewhere Classified | Physical sciences | Plasmas And Electrical Discharges | Scientific instrumentation

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