Linkage Infrastructure, Equipment and Facilities - Grant ID: LE0560683

Funding Activity

Website
http://dataportal.arc.gov.au/NCGP/Web/Grant/Grant/LE0560683

Funding Status
Closed

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Funded Activity Summary

A furnace stack for advanced photovoltaic, photonic and microfabrication applications. Advanced silicon photovoltaic, photonic, optoelectronic and micro-electromechanical devices require state of the art processing equipment for the deposition of thin dielectric films and for controlled doping of the devices. Key techniques include the deposition of stoichiometric and silicon rich silicon nitride and silicon dioxide films, and the controlled wafer doping with boron and phosphorus. A state of the art furnace stack is to be procured which will satisfy these requirements on industrially relevant wafer sizes up to 150mm. The equipment will support a broad range of research projects in the above fields, ranging from fundamental investigations to applied research carried out in collaboration with industry partners.

Funded Activity Details

Start Date: 01-01-2005

End Date: 31-12-2006

Funding Scheme: Linkage Infrastructure, Equipment and Facilities

Funding Amount: $321,953.00

Funder: Australian Research Council

Research Topics

ANZSRC Field of Research (FoR)

Materials Engineering Not Elsewhere Classified | Nanotechnology | Other Electronic Engineering | Materials Engineering

ANZSRC Socio-Economic Objective (SEO)

Solar-photoelectric | Renewable energy |

Other Keywords

Materials Engineering | Materials Engineering Not Elsewhere Classified | Nanotechnology | Other Electronic Engineering | Renewable energy | Solar-photoelectric

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