Linkage Infrastructure, Equipment and Facilities - Grant ID: LE0453879

Funding Activity

Website
http://dataportal.arc.gov.au/NCGP/Web/Grant/Grant/LE0453879

Funding Status
Closed

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Funded Activity Summary

Electron beam induced deposition and ablation nanofabrication facility. Electron beam induced deposition and ablation(EBIDA) is rapidly emerging as a new technology capable of fabricating three-dimensional nanostructures on nearly any substrate with very high precision. This proposal aims to establish a nanoscale EBIDA facility by integrating a specialized nanolithography attachment with an existing state-of-the-art 1nm resolution high current variable pressure scanning electron microscope. This combination of instrumentation will enable the high-speed production of conductive and insulating structures with 1-to-10nm dimensions. The unique facility will be used to manufacture and prototype novel nanoscale devices and structures and will enable measurement of their physical and chemical properties.

Funded Activity Details

Start Date: 01-03-2005

End Date: 01-03-2006

Funding Scheme: Linkage Infrastructure, Equipment and Facilities

Funding Amount: $184,163.00

Funder: Australian Research Council

Research Topics

ANZSRC Field of Research (FoR)

Materials Engineering Not Elsewhere Classified | Nanotechnology | Instruments And Techniques | Materials Engineering

ANZSRC Socio-Economic Objective (SEO)

Other | Scientific instrumentation |

Other Keywords

Instruments And Techniques | Materials Engineering | Materials Engineering Not Elsewhere Classified | Nanotechnology | Other | Scientific instrumentation

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