ARC Future Fellowships - Grant ID: FT130100543

Funded Activity Summary

Integrated Piezoelectric Microsystems for Actuation and Sensing. Piezoelectric transducers provide the highest positioning accuracy of any known actuator and the highest dynamic force resolution of any known sensor. However, these capabilities are limited to macro scale applications since piezoelectric materials are not compatible with integrated circuit (IC) or Micro-Electro-Mechanical Systems fabrication processes. This project aims to extend the use of piezoelectric materials to the meso- and micro-scale by fabricating miniature piezoelectric positioning and sensor systems. These devices will include six-axis nano-positioners and ultra-high resolution accelerometers and gyroscopes. This technology will create a new market for devices that are lower cost than macro-scale systems but provide higher performance than silicon based microsystems.

Funded Activity Details

Start Date: 01-01-2014

End Date: 20-12-2019

Funding Scheme: ARC Future Fellowships

Funding Amount: $749,920.00

Funder: Australian Research Council

Research Topics

ANZSRC Field of Research (FoR)

Electrical and Electronic Engineering | Dynamical Systems in Applications | Dynamics, Vibration and Vibration Control | Control Systems, Robotics and Automation

ANZSRC Socio-Economic Objective (SEO)

Industrial Instruments | Scientific Instruments | Expanding Knowledge in Engineering |

Other Keywords

Control Systems, Robotics and Automation | Dynamical Systems in Applications | Dynamics, Vibration and Vibration Control | Electrical and Electronic Engineering | Expanding Knowledge in Engineering | Industrial Instruments | Scientific Instruments

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