Discovery Projects - Grant ID: DP0559398

Funding Activity

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Funded Activity Summary

Theoretical and Numerical Analyses on Smart-Cut Technology. Smart-cut is an innovative and effective technique for fabricating high quality silicon-on-insulator structures which are widely used in the semiconductor and microelectronics industries. The quantification of the effects of processing parameters and the optimization of smart-cut process will be conducted in this project. The results are expected to make significant contributions to reducing cost, increasing efficiency and optimizing procedure by providing a theoretical and quantitative design methodology to improve the smart-cut technique. Consequently, the outcomes and results of the project will bring many benefits to and encourage further R&D in the semiconductor and microelectronics industries in Australia.

Funded Activity Details

Start Date: 29-04-2005

End Date: 19-08-2008

Funding Scheme: Discovery Projects

Funding Amount: $220,644.00

Funder: Australian Research Council