Discovery Projects - Grant ID: DP0208896

Funding Activity

Website
http://dataportal.arc.gov.au/NCGP/Web/Grant/Grant/DP0208896

Funding Status
Closed

Does something not look right? The information on this page has been harvested from data sources that may not be up to date. We continue to work with information providers to improve coverage and quality. To report an issue, use the .

Funded Activity Summary

A surface modification techniques for wafers of semiconductor materials. The research will develop an innovative technique for producing large wafers of semiconductor materials with a superfine surface finish. This technique will combine the advantages of ultra-precision grinding and polishing into a single operation. An effective superfinishing technique for the new generation of large-size wafers of semiconductor materials is essential because they are one of the most important materials for information technology, integrated circuit technology and fabrication of micro-machines.

Funded Activity Details

Start Date: 01-05-2002

End Date: 31-12-2002

Funding Scheme: Discovery Projects

Funding Amount: $40,000.00

Funder: Australian Research Council

Research Topics

ANZSRC Field of Research (FoR)

Materials Engineering Not Elsewhere Classified | Materials Engineering

ANZSRC Socio-Economic Objective (SEO)

Construction machinery and equipment |

Other Keywords

Construction machinery and equipment | Materials Engineering | Materials Engineering Not Elsewhere Classified

Related Links