Discovery Projects - Grant ID: DP0208814

Funding Activity

Website
http://dataportal.arc.gov.au/NCGP/Web/Grant/Grant/DP0208814

Funding Status
Closed

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Funded Activity Summary

Nanocavities in Si - Structural Evolution and Metal Gettering. Nanocavities represent a novel means of minimising metallic contamination in the active region of Si microelectronic devices. We propose innovative experiments, using in-situ transmission electron microscopy and synchrotron-based x-ray methods, to achieve a fundamental understanding of the processes that govern nanocavity structural evolution and metallic impurity trapping. We seek to develop a patentable technology to enhance impurity trapping efficiency and thus dramatically increase the applicability of this industrially-relevant process.

Funded Activity Details

Start Date: 01-01-2002

End Date: 31-12-2004

Funding Scheme: Discovery Projects

Funding Amount: $183,000.00

Funder: Australian Research Council

Research Topics

ANZSRC Field of Research (FoR)

Materials Engineering Not Elsewhere Classified | Condensed Matter Physics—Structural Properties | Materials Engineering | Electrical Engineering

ANZSRC Socio-Economic Objective (SEO)

Other | Integrated circuits and devices | Physical sciences |

Other Keywords

Condensed Matter Physics—Structural Properties | Electrical Engineering | Integrated circuits and devices | Materials Engineering | Materials Engineering Not Elsewhere Classified | Other | Physical sciences

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