Discovery Early Career Researcher Award - Grant ID: DE240100507

Funding Activity

Website
http://dataportal.arc.gov.au/NCGP/Web/Grant/Grant/DE240100507

Funding Status
Active

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Funded Activity Summary

Integrated active microcantilevers for high-throughput nanometrology. This project aims to develop a new versatile, high-performance microsensor platform and microscopy method for measuring nano-scale structures. The proposed microscopy tool is expected to significantly increase imaging speed and miniaturize system footprint, thereby enabling high-throughput quality control of semiconductor devices. The expected outcome is a highly-scalable and low-cost imaging system that will close the technology gap between fabrication and inspection at the nanoscale. The benefits to Australia should include the potential for commercialization to develop this next-generation microscopy tool in high-value market sectors.

Funded Activity Details

Start Date: 01-01-2024

End Date: 31-12-2026

Funding Scheme: Discovery Early Career Researcher Award

Funding Amount: $444,471.00

Funder: Australian Research Council

Research Topics

ANZSRC Field of Research (FoR)

Mechanical engineering | Nanometrology | Microelectromechanical systems (MEMS) | Dynamics vibration and vibration control

ANZSRC Socio-Economic Objective (SEO)

Other Keywords

Dynamics vibration and vibration control | Expanding Knowledge In Engineering | Industrial Instruments | Mechanical engineering | Microelectromechanical systems (MEMS) | Nanometrology | Scientific Instruments

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