Discovery Early Career Researcher Award - Grant ID: DE140100805

Funding Activity

Website
http://dataportal.arc.gov.au/NCGP/Web/Grant/Grant/DE140100805

Funding Status
Closed

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Funded Activity Summary

Radioisotope-powered Parallel Electron Lithography for High-throughput Nano-manufacturing. This project aims to realise rapid fabrication of controllable nano-devices over large areas with high throughput and low cost. The lack of large-size (greater than four inch) mask and ultra-low dose resist are the fundamental challenges for high-throughput radioisotope-powered parallel electron nano-lithography (RIPEL) systems. This project aims to realise a large-size RIPEL mask by using the ultra-light supporting material aerographite that has a state-of-the-art ratio value of Young's modulus to cubic density. It will also develop a new inorganic nanoparticle resist with ultra-low dose. These building blocks will enhance RIPEL's throughput by four orders of magnitude. The project will contribute to making processors or solid state storage cheaper and more efficient.

Funded Activity Details

Start Date: 15-03-2014

End Date: 30-06-2017

Funding Scheme: Discovery Early Career Researcher Award

Funding Amount: $395,220.00

Funder: Australian Research Council

Research Topics

ANZSRC Field of Research (FoR)

Nanomanufacturing | Nanomaterials | Nanotechnology | Microelectromechanical Systems (MEMS)

ANZSRC Socio-Economic Objective (SEO)

Integrated Circuits and Devices | Solar-Photovoltaic Energy | Expanding Knowledge in Technology |

Other Keywords

Expanding Knowledge in Technology | Integrated Circuits and Devices | Microelectromechanical Systems (MEMS) | Nanomanufacturing | Nanomaterials | Nanotechnology | Solar-Photovoltaic Energy

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