Linkage - International - Grant ID: LX0242374

Funding Activity

Website
http://dataportal.arc.gov.au/NCGP/API/grants/LX0242374

Funding Status
Closed

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Funded Activity Summary

Nonlinear Phenomena in RF Plasmas for Materials Processing Applications. This coordinated and experimental and theoretical proposal focuses on the investigation of the nonlinear phenomena in radio frequency plasma discharges suitable for material processing applications. The effect of time-varying and steady-state nonlinear plasma responses on the electromagnetic fields and the working parameters of the low-frequency inductively coupled plasmas will be investigated theoretically and experimentally. The expected outcome of the project will be used for optimizing the performance and stability of the low frequency inductively coupled plasma devices.

Funded Activity Details

Start Date: 2003

End Date: 12-2006

Funding Scheme: Linkage - International

Funding Amount: $20,700.00

Funder: Australian Research Council

Research Topics

ANZSRC Field of Research (FoR)

Atomic, Molecular, Nuclear, Particle and Plasma Physics | Plasmas And Electrical Discharges

ANZSRC Socio-Economic Objective (SEO)

Physical sciences |

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