Subsurface Atomic Force Microscopy using Dual Probes. The proposal aims to develop a new microscopy method for imaging nano-scale structures buried below the surface of a sample; for example, metal conductors in a computer processor chip. The expected outcome is a new method for creating subsurface images with an application focus on semiconductor device inspection and quality control. The proposed microscope is expected to create new economic opportunities including new commercial products, int ....Subsurface Atomic Force Microscopy using Dual Probes. The proposal aims to develop a new microscopy method for imaging nano-scale structures buried below the surface of a sample; for example, metal conductors in a computer processor chip. The expected outcome is a new method for creating subsurface images with an application focus on semiconductor device inspection and quality control. The proposed microscope is expected to create new economic opportunities including new commercial products, intellectual property, and the potential for a start-up venture. The benefits to Australia should include the creation of new job opportunities and the development of local expertise in a high-value market sector.Read moreRead less
Discovery Early Career Researcher Award - Grant ID: DE240100507
Funder
Australian Research Council
Funding Amount
$444,471.00
Summary
Integrated active microcantilevers for high-throughput nanometrology. This project aims to develop a new versatile, high-performance microsensor platform and microscopy method for measuring nano-scale structures. The proposed microscopy tool is expected to significantly increase imaging speed and miniaturize system footprint, thereby enabling high-throughput quality control of semiconductor devices. The expected outcome is a highly-scalable and low-cost imaging system that will close the technol ....Integrated active microcantilevers for high-throughput nanometrology. This project aims to develop a new versatile, high-performance microsensor platform and microscopy method for measuring nano-scale structures. The proposed microscopy tool is expected to significantly increase imaging speed and miniaturize system footprint, thereby enabling high-throughput quality control of semiconductor devices. The expected outcome is a highly-scalable and low-cost imaging system that will close the technology gap between fabrication and inspection at the nanoscale. The benefits to Australia should include the potential for commercialization to develop this next-generation microscopy tool in high-value market sectors.Read moreRead less
Microcantilevers for multifrequency atomic force microscopy. This project aims to design a microcantilever with high-performing sensors more sensitive and with better noise performance than the typical optical system used in commercial Atomic Force Microscopes (AFMs). The AFM, a nanotechnology instrument, uses a microcantilever (with an extremely shape probe) to interrogate a sample surface. It has made important discoveries in nanotechnology, life sciences, nanomachining, material science and d ....Microcantilevers for multifrequency atomic force microscopy. This project aims to design a microcantilever with high-performing sensors more sensitive and with better noise performance than the typical optical system used in commercial Atomic Force Microscopes (AFMs). The AFM, a nanotechnology instrument, uses a microcantilever (with an extremely shape probe) to interrogate a sample surface. It has made important discoveries in nanotechnology, life sciences, nanomachining, material science and data storage systems. Despite its success, the technique’s spatial resolution and quantitative measurements are limited. This project could lead to breakthrough technologies such as atomic force spectroscopy to study elastic modulus of nanostructures, and establish Australia's prominence in this emerging field.Read moreRead less