Development of high-performance lead-free piezoelectric superlattices for environmentally-friendly and biocompatible piezoelectric micromachined ultrasonic transducers (pMUTs) applications. This program is aimed at development of environmentally friendly and biocompatible lead-free piezoelectric thin films and superlattices for the potential applications in pMUTs. The expected outcome includes deposition of BNT and BZT-based thin films and superlattices, and enhancement of their physical propert ....Development of high-performance lead-free piezoelectric superlattices for environmentally-friendly and biocompatible piezoelectric micromachined ultrasonic transducers (pMUTs) applications. This program is aimed at development of environmentally friendly and biocompatible lead-free piezoelectric thin films and superlattices for the potential applications in pMUTs. The expected outcome includes deposition of BNT and BZT-based thin films and superlattices, and enhancement of their physical properties by strain and interface engineering.Read moreRead less