Subsurface Atomic Force Microscopy using Dual Probes. The proposal aims to develop a new microscopy method for imaging nano-scale structures buried below the surface of a sample; for example, metal conductors in a computer processor chip. The expected outcome is a new method for creating subsurface images with an application focus on semiconductor device inspection and quality control. The proposed microscope is expected to create new economic opportunities including new commercial products, int ....Subsurface Atomic Force Microscopy using Dual Probes. The proposal aims to develop a new microscopy method for imaging nano-scale structures buried below the surface of a sample; for example, metal conductors in a computer processor chip. The expected outcome is a new method for creating subsurface images with an application focus on semiconductor device inspection and quality control. The proposed microscope is expected to create new economic opportunities including new commercial products, intellectual property, and the potential for a start-up venture. The benefits to Australia should include the creation of new job opportunities and the development of local expertise in a high-value market sector.Read moreRead less
A New Nano Tip Fabrication Technique for Atomic Force Microscopy. This project aims to develop a new fabrication technique for high-aspect-ratio (long and sharp) tips for atomic force microscopy. The technique is expected to overcome the current fabrication limitation, that is fabricating one tip at a time which is unsuitable for batch fabrication. The proposed technique can be scaled up to mass produce nano tips. The technique is expected to create new commercial products and intellectual prope ....A New Nano Tip Fabrication Technique for Atomic Force Microscopy. This project aims to develop a new fabrication technique for high-aspect-ratio (long and sharp) tips for atomic force microscopy. The technique is expected to overcome the current fabrication limitation, that is fabricating one tip at a time which is unsuitable for batch fabrication. The proposed technique can be scaled up to mass produce nano tips. The technique is expected to create new commercial products and intellectual property. This innovation will lead to the emergence of breakthrough technologies in nanofabrication and nanomaterials synthesis. The benefits to Australia include new job opportunities and the development of local expertise in the field.Read moreRead less
Atomic Resolution Sensors for Imaging and Metrological Science. This project aims to create new sensing technologies for detecting motion on the atomic scale with Megahertz (MHz) bandwidth. Advanced signal processing and communication theory will be applied with the aim of developing new classes of capacitive, inductive and optical position sensors. The resolution and bandwidth are predicted to be a one-hundred fold improvement over the current state-of-the-art. Applications are expected to incl ....Atomic Resolution Sensors for Imaging and Metrological Science. This project aims to create new sensing technologies for detecting motion on the atomic scale with Megahertz (MHz) bandwidth. Advanced signal processing and communication theory will be applied with the aim of developing new classes of capacitive, inductive and optical position sensors. The resolution and bandwidth are predicted to be a one-hundred fold improvement over the current state-of-the-art. Applications are expected to include biomedical imaging, high-speed nanofabrication, high-resolution computer numerical control (CNC) machining, high-speed gas and chemical sensors, and ultra-precise seismometers and gyroscopes.Read moreRead less
A miniaturised laser manipulator for ultra-precise and pain-free dentistry. This project aims to develop a miniaturized high-precision laser robotic device that can fit comfortably in the mouth to perform pain-free, vibration-free dental operations by utilising silicon-carbide on silicon technology to create a millimetre-sized two-axis controllable, highly-reflective mirror robust to high-power ultra-short laser pulses. This project expects to generate new knowledge in micro-mirror control using ....A miniaturised laser manipulator for ultra-precise and pain-free dentistry. This project aims to develop a miniaturized high-precision laser robotic device that can fit comfortably in the mouth to perform pain-free, vibration-free dental operations by utilising silicon-carbide on silicon technology to create a millimetre-sized two-axis controllable, highly-reflective mirror robust to high-power ultra-short laser pulses. This project expects to generate new knowledge in micro-mirror control using optically excited piezo-resistive sensors, and cold femtosecond laser ablation of hard dental tissue. Expected outcomes include a working prototype for laser removal of tooth materials at speeds exceeding dental drills, providing benefits in miniaturized laser devices and ultimately removing pain from dental procedures. Read moreRead less
Integrated Piezoelectric Microsystems for Actuation and Sensing. Piezoelectric transducers provide the highest positioning accuracy of any known actuator and the highest dynamic force resolution of any known sensor. However, these capabilities are limited to macro scale applications since piezoelectric materials are not compatible with integrated circuit (IC) or Micro-Electro-Mechanical Systems fabrication processes. This project aims to extend the use of piezoelectric materials to the meso- and ....Integrated Piezoelectric Microsystems for Actuation and Sensing. Piezoelectric transducers provide the highest positioning accuracy of any known actuator and the highest dynamic force resolution of any known sensor. However, these capabilities are limited to macro scale applications since piezoelectric materials are not compatible with integrated circuit (IC) or Micro-Electro-Mechanical Systems fabrication processes. This project aims to extend the use of piezoelectric materials to the meso- and micro-scale by fabricating miniature piezoelectric positioning and sensor systems. These devices will include six-axis nano-positioners and ultra-high resolution accelerometers and gyroscopes. This technology will create a new market for devices that are lower cost than macro-scale systems but provide higher performance than silicon based microsystems.Read moreRead less
Microcantilevers for multifrequency atomic force microscopy. This project aims to design a microcantilever with high-performing sensors more sensitive and with better noise performance than the typical optical system used in commercial Atomic Force Microscopes (AFMs). The AFM, a nanotechnology instrument, uses a microcantilever (with an extremely shape probe) to interrogate a sample surface. It has made important discoveries in nanotechnology, life sciences, nanomachining, material science and d ....Microcantilevers for multifrequency atomic force microscopy. This project aims to design a microcantilever with high-performing sensors more sensitive and with better noise performance than the typical optical system used in commercial Atomic Force Microscopes (AFMs). The AFM, a nanotechnology instrument, uses a microcantilever (with an extremely shape probe) to interrogate a sample surface. It has made important discoveries in nanotechnology, life sciences, nanomachining, material science and data storage systems. Despite its success, the technique’s spatial resolution and quantitative measurements are limited. This project could lead to breakthrough technologies such as atomic force spectroscopy to study elastic modulus of nanostructures, and establish Australia's prominence in this emerging field.Read moreRead less
Discovery Early Career Researcher Award - Grant ID: DE240100507
Funder
Australian Research Council
Funding Amount
$444,471.00
Summary
Integrated active microcantilevers for high-throughput nanometrology. This project aims to develop a new versatile, high-performance microsensor platform and microscopy method for measuring nano-scale structures. The proposed microscopy tool is expected to significantly increase imaging speed and miniaturize system footprint, thereby enabling high-throughput quality control of semiconductor devices. The expected outcome is a highly-scalable and low-cost imaging system that will close the technol ....Integrated active microcantilevers for high-throughput nanometrology. This project aims to develop a new versatile, high-performance microsensor platform and microscopy method for measuring nano-scale structures. The proposed microscopy tool is expected to significantly increase imaging speed and miniaturize system footprint, thereby enabling high-throughput quality control of semiconductor devices. The expected outcome is a highly-scalable and low-cost imaging system that will close the technology gap between fabrication and inspection at the nanoscale. The benefits to Australia should include the potential for commercialization to develop this next-generation microscopy tool in high-value market sectors.Read moreRead less
Integrated on-chip force and displacement sensors for high-speed atomic force microscopy of ultimate sensitivity. This project aims to develop next generation atomic force microscopy systems based on a novel interferometric method for on-chip force and displacement sensing. The proposed sensitivity improvement of two orders of magnitude over the present state-of-the-art will provide a disruptive innovation for various present and future nanotechnologies.
Generalised Energy Based Robust and Nonlinear Control Systems. This project aims to develop new energy-based theories of robust stability analysis and controller design for both linear and nonlinear systems, building on passivity and negative imaginary system theories and their physical interpretations along with stochastic optimal control theory. These control theories would allow for a wide range of plant dynamics in the design of high-performance robust control systems, enabling advances in e ....Generalised Energy Based Robust and Nonlinear Control Systems. This project aims to develop new energy-based theories of robust stability analysis and controller design for both linear and nonlinear systems, building on passivity and negative imaginary system theories and their physical interpretations along with stochastic optimal control theory. These control theories would allow for a wide range of plant dynamics in the design of high-performance robust control systems, enabling advances in emerging technologies including nanopositioning, micro-electromechanical systems and opto-mechatronics. The project plans to combine these theoretical advances with numerical methods involving advanced optimisation tools and the experimental implementation of nanopositioning control systems in atomic force microscopy.Read moreRead less
Linkage Infrastructure, Equipment And Facilities - Grant ID: LE120100215
Funder
Australian Research Council
Funding Amount
$300,000.00
Summary
Facility for characterisation of engineered microelectromechanical systems. This facility will provide Australian microelectromechanical (MEMS) researchers with a vital, world-class, capacity for characterisation of micro-machined devices and transducers, enabling them to compete internationally in this emerging field.