Linkage Infrastructure, Equipment And Facilities - Grant ID: LE160100062
Funder
Australian Research Council
Funding Amount
$700,000.00
Summary
Silicon LPCVD Facility for Nanoelectronics, Quantum Computing & Solar Cells. Silicon low-pressure chemical vapor deposition facility:
This project aims to complete Australia’s first manufacturing line for nanoscale devices. It aims to establish a low-pressure chemical vapour deposition system to complete the existing silicon complementary metal-oxide semiconductor process line. It is currently impossible to fabricate many devices compatible with industrial manufacture, limiting device reliabili ....Silicon LPCVD Facility for Nanoelectronics, Quantum Computing & Solar Cells. Silicon low-pressure chemical vapor deposition facility:
This project aims to complete Australia’s first manufacturing line for nanoscale devices. It aims to establish a low-pressure chemical vapour deposition system to complete the existing silicon complementary metal-oxide semiconductor process line. It is currently impossible to fabricate many devices compatible with industrial manufacture, limiting device reliability and path to commercialisation. The tool is designed to incorporate four furnace tubes for growing thin layers of electronic materials, including polycrystalline-silicon, epitaxial silicon, and silicon-nitride. One unique aspect will be growth of isotopically-enriched silicon-28 that is essential for spin-based quantum computing. The tool would support a wide range of projects nationally in silicon micro/nano-systems, advanced photovoltaics, and quantum technologies.Read moreRead less
Photonic chip inertial movement sensors. This project aims to create a new class of optical inertial movement sensors using integrated photonic chip technology. By replacing optical fibre coils with compact waveguides, integrating light sources on-chip and by harnessing smart sensing approaches, we intend to reduce the required power from watts to milliwatts and reduce the dimensions from meters to centimetres. The expected project outcomes are sensors with military grade precision but with the ....Photonic chip inertial movement sensors. This project aims to create a new class of optical inertial movement sensors using integrated photonic chip technology. By replacing optical fibre coils with compact waveguides, integrating light sources on-chip and by harnessing smart sensing approaches, we intend to reduce the required power from watts to milliwatts and reduce the dimensions from meters to centimetres. The expected project outcomes are sensors with military grade precision but with the size, cost and manufacturability of consumer electronics. This technology will fill a strategic gap in the movement sensor market enabling applications ranging from robotic infrastructure monitoring, manufacture and surgery to guiding satellites and other space craft.Read moreRead less