Subsurface Atomic Force Microscopy using Dual Probes. The proposal aims to develop a new microscopy method for imaging nano-scale structures buried below the surface of a sample; for example, metal conductors in a computer processor chip. The expected outcome is a new method for creating subsurface images with an application focus on semiconductor device inspection and quality control. The proposed microscope is expected to create new economic opportunities including new commercial products, int ....Subsurface Atomic Force Microscopy using Dual Probes. The proposal aims to develop a new microscopy method for imaging nano-scale structures buried below the surface of a sample; for example, metal conductors in a computer processor chip. The expected outcome is a new method for creating subsurface images with an application focus on semiconductor device inspection and quality control. The proposed microscope is expected to create new economic opportunities including new commercial products, intellectual property, and the potential for a start-up venture. The benefits to Australia should include the creation of new job opportunities and the development of local expertise in a high-value market sector.Read moreRead less
Control, estimation and nanopositioning for high-throughput probe-storage. Probe-storage is a new technology for storing digital information as tiny indentations on a storage medium. It offers the highest data storage density compared with alternative technologies. This project aims to develop methods and the underpinning theory to realise a new probe-storage memory that is much faster and can store data at much higher rates.
Atomic Resolution Sensors for Imaging and Metrological Science. This project aims to create new sensing technologies for detecting motion on the atomic scale with Megahertz (MHz) bandwidth. Advanced signal processing and communication theory will be applied with the aim of developing new classes of capacitive, inductive and optical position sensors. The resolution and bandwidth are predicted to be a one-hundred fold improvement over the current state-of-the-art. Applications are expected to incl ....Atomic Resolution Sensors for Imaging and Metrological Science. This project aims to create new sensing technologies for detecting motion on the atomic scale with Megahertz (MHz) bandwidth. Advanced signal processing and communication theory will be applied with the aim of developing new classes of capacitive, inductive and optical position sensors. The resolution and bandwidth are predicted to be a one-hundred fold improvement over the current state-of-the-art. Applications are expected to include biomedical imaging, high-speed nanofabrication, high-resolution computer numerical control (CNC) machining, high-speed gas and chemical sensors, and ultra-precise seismometers and gyroscopes.Read moreRead less
Microcantilevers for multifrequency atomic force microscopy. This project aims to design a microcantilever with high-performing sensors more sensitive and with better noise performance than the typical optical system used in commercial Atomic Force Microscopes (AFMs). The AFM, a nanotechnology instrument, uses a microcantilever (with an extremely shape probe) to interrogate a sample surface. It has made important discoveries in nanotechnology, life sciences, nanomachining, material science and d ....Microcantilevers for multifrequency atomic force microscopy. This project aims to design a microcantilever with high-performing sensors more sensitive and with better noise performance than the typical optical system used in commercial Atomic Force Microscopes (AFMs). The AFM, a nanotechnology instrument, uses a microcantilever (with an extremely shape probe) to interrogate a sample surface. It has made important discoveries in nanotechnology, life sciences, nanomachining, material science and data storage systems. Despite its success, the technique’s spatial resolution and quantitative measurements are limited. This project could lead to breakthrough technologies such as atomic force spectroscopy to study elastic modulus of nanostructures, and establish Australia's prominence in this emerging field.Read moreRead less
Integrated Piezoelectric Microsystems for Actuation and Sensing. Piezoelectric transducers provide the highest positioning accuracy of any known actuator and the highest dynamic force resolution of any known sensor. However, these capabilities are limited to macro scale applications since piezoelectric materials are not compatible with integrated circuit (IC) or Micro-Electro-Mechanical Systems fabrication processes. This project aims to extend the use of piezoelectric materials to the meso- and ....Integrated Piezoelectric Microsystems for Actuation and Sensing. Piezoelectric transducers provide the highest positioning accuracy of any known actuator and the highest dynamic force resolution of any known sensor. However, these capabilities are limited to macro scale applications since piezoelectric materials are not compatible with integrated circuit (IC) or Micro-Electro-Mechanical Systems fabrication processes. This project aims to extend the use of piezoelectric materials to the meso- and micro-scale by fabricating miniature piezoelectric positioning and sensor systems. These devices will include six-axis nano-positioners and ultra-high resolution accelerometers and gyroscopes. This technology will create a new market for devices that are lower cost than macro-scale systems but provide higher performance than silicon based microsystems.Read moreRead less
Generalised Energy Based Robust and Nonlinear Control Systems. This project aims to develop new energy-based theories of robust stability analysis and controller design for both linear and nonlinear systems, building on passivity and negative imaginary system theories and their physical interpretations along with stochastic optimal control theory. These control theories would allow for a wide range of plant dynamics in the design of high-performance robust control systems, enabling advances in e ....Generalised Energy Based Robust and Nonlinear Control Systems. This project aims to develop new energy-based theories of robust stability analysis and controller design for both linear and nonlinear systems, building on passivity and negative imaginary system theories and their physical interpretations along with stochastic optimal control theory. These control theories would allow for a wide range of plant dynamics in the design of high-performance robust control systems, enabling advances in emerging technologies including nanopositioning, micro-electromechanical systems and opto-mechatronics. The project plans to combine these theoretical advances with numerical methods involving advanced optimisation tools and the experimental implementation of nanopositioning control systems in atomic force microscopy.Read moreRead less
Linkage Infrastructure, Equipment And Facilities - Grant ID: LE120100215
Funder
Australian Research Council
Funding Amount
$300,000.00
Summary
Facility for characterisation of engineered microelectromechanical systems. This facility will provide Australian microelectromechanical (MEMS) researchers with a vital, world-class, capacity for characterisation of micro-machined devices and transducers, enabling them to compete internationally in this emerging field.