Atomic Resolution Sensors for Imaging and Metrological Science. This project aims to create new sensing technologies for detecting motion on the atomic scale with Megahertz (MHz) bandwidth. Advanced signal processing and communication theory will be applied with the aim of developing new classes of capacitive, inductive and optical position sensors. The resolution and bandwidth are predicted to be a one-hundred fold improvement over the current state-of-the-art. Applications are expected to incl ....Atomic Resolution Sensors for Imaging and Metrological Science. This project aims to create new sensing technologies for detecting motion on the atomic scale with Megahertz (MHz) bandwidth. Advanced signal processing and communication theory will be applied with the aim of developing new classes of capacitive, inductive and optical position sensors. The resolution and bandwidth are predicted to be a one-hundred fold improvement over the current state-of-the-art. Applications are expected to include biomedical imaging, high-speed nanofabrication, high-resolution computer numerical control (CNC) machining, high-speed gas and chemical sensors, and ultra-precise seismometers and gyroscopes.Read moreRead less
Discovery Early Career Researcher Award - Grant ID: DE240100507
Funder
Australian Research Council
Funding Amount
$444,471.00
Summary
Integrated active microcantilevers for high-throughput nanometrology. This project aims to develop a new versatile, high-performance microsensor platform and microscopy method for measuring nano-scale structures. The proposed microscopy tool is expected to significantly increase imaging speed and miniaturize system footprint, thereby enabling high-throughput quality control of semiconductor devices. The expected outcome is a highly-scalable and low-cost imaging system that will close the technol ....Integrated active microcantilevers for high-throughput nanometrology. This project aims to develop a new versatile, high-performance microsensor platform and microscopy method for measuring nano-scale structures. The proposed microscopy tool is expected to significantly increase imaging speed and miniaturize system footprint, thereby enabling high-throughput quality control of semiconductor devices. The expected outcome is a highly-scalable and low-cost imaging system that will close the technology gap between fabrication and inspection at the nanoscale. The benefits to Australia should include the potential for commercialization to develop this next-generation microscopy tool in high-value market sectors.Read moreRead less
Nanometrology of laser-trapped airborne particles. This project aims to develop a new concept of touch-free measuring of physical characteristics of nanoparticles using specially designed optical vortex beams. The new concept will be of direct importance in developing new nanotechnologies demanding ever-increasing purity of every element in the industrial environment and production processes.