Linkage Infrastructure, Equipment And Facilities - Grant ID: LE0238960
Funder
Australian Research Council
Funding Amount
$940,000.00
Summary
High Performance Semiconductor Micromachining Facility. The purpose of this project is to make available to the Australian semiconductor research community a facility to undertake specialist deposition and etching tasks needed for fabrication of next generation solar cells, microelectronics, optronics, and micro-electromechanical systems. The facility will have the flexibility to allow independent control of major process parameters, allowing development of new fabrication technologies which wi ....High Performance Semiconductor Micromachining Facility. The purpose of this project is to make available to the Australian semiconductor research community a facility to undertake specialist deposition and etching tasks needed for fabrication of next generation solar cells, microelectronics, optronics, and micro-electromechanical systems. The facility will have the flexibility to allow independent control of major process parameters, allowing development of new fabrication technologies which will be generic to a wide range of semiconductor materials. In particular, the facility will be unique in its ability to perform processes at low temperatures, and under conditions that allow optimisation of the deposition and etching processes, without compromising the performance of delicate devices or exceeding the maximum process temperature limitations found in many mainstream semiconductor materials technologies.Read moreRead less
Linkage Infrastructure, Equipment And Facilities - Grant ID: LE0345794
Funder
Australian Research Council
Funding Amount
$200,000.00
Summary
Spectroscopic Imaging Ellipsometry for Opto-VLSI Engineering and Nanotechnology Applications. The focus for implementation of spectroscopic imaging ellipsometry is to create a powerful optical analysis and characterisation tool to complement the advanced integrated circuit test facilities within Western Australia. This infrastructure will facilitate the integration of the fields of materials research, new device technologies, integrated circuit technology, nanotechnology and photonics in the exp ....Spectroscopic Imaging Ellipsometry for Opto-VLSI Engineering and Nanotechnology Applications. The focus for implementation of spectroscopic imaging ellipsometry is to create a powerful optical analysis and characterisation tool to complement the advanced integrated circuit test facilities within Western Australia. This infrastructure will facilitate the integration of the fields of materials research, new device technologies, integrated circuit technology, nanotechnology and photonics in the expanding field of Opto-VLSI. The proposed equipment is being built upon targeted research in VLSI, and will create an additional platform for innovations in microelectronic technology applicable to the communications, information technology, energy generation, security, and biomedical fields.Read moreRead less