Theoretical and Numerical Analyses on Smart-Cut Technology. Smart-cut is an innovative and effective technique for fabricating high quality silicon-on-insulator structures which are widely used in the semiconductor and microelectronics industries. The quantification of the effects of processing parameters and the optimization of smart-cut process will be conducted in this project. The results are expected to make significant contributions to reducing cost, increasing efficiency and optimizing pr ....Theoretical and Numerical Analyses on Smart-Cut Technology. Smart-cut is an innovative and effective technique for fabricating high quality silicon-on-insulator structures which are widely used in the semiconductor and microelectronics industries. The quantification of the effects of processing parameters and the optimization of smart-cut process will be conducted in this project. The results are expected to make significant contributions to reducing cost, increasing efficiency and optimizing procedure by providing a theoretical and quantitative design methodology to improve the smart-cut technique. Consequently, the outcomes and results of the project will bring many benefits to and encourage further R&D in the semiconductor and microelectronics industries in Australia.Read moreRead less