Linkage Infrastructure, Equipment And Facilities - Grant ID: LE0238960
Funder
Australian Research Council
Funding Amount
$940,000.00
Summary
High Performance Semiconductor Micromachining Facility. The purpose of this project is to make available to the Australian semiconductor research community a facility to undertake specialist deposition and etching tasks needed for fabrication of next generation solar cells, microelectronics, optronics, and micro-electromechanical systems. The facility will have the flexibility to allow independent control of major process parameters, allowing development of new fabrication technologies which wi ....High Performance Semiconductor Micromachining Facility. The purpose of this project is to make available to the Australian semiconductor research community a facility to undertake specialist deposition and etching tasks needed for fabrication of next generation solar cells, microelectronics, optronics, and micro-electromechanical systems. The facility will have the flexibility to allow independent control of major process parameters, allowing development of new fabrication technologies which will be generic to a wide range of semiconductor materials. In particular, the facility will be unique in its ability to perform processes at low temperatures, and under conditions that allow optimisation of the deposition and etching processes, without compromising the performance of delicate devices or exceeding the maximum process temperature limitations found in many mainstream semiconductor materials technologies.Read moreRead less
Linkage Infrastructure, Equipment And Facilities - Grant ID: LE0775499
Funder
Australian Research Council
Funding Amount
$130,000.00
Summary
High Performance Optical Profilometer for mapping micro/meso/macroscopic topography. Developing advanced, high performance new materials requires an understanding of surfaces and interfaces. Making a small area, low yield material or device is a regular occurrence within the Australian research community. The ability to create reproducible, high yield materials requires greater understanding of the stresses, uniformities and deformations in a material over large areas. The proposed instrument ....High Performance Optical Profilometer for mapping micro/meso/macroscopic topography. Developing advanced, high performance new materials requires an understanding of surfaces and interfaces. Making a small area, low yield material or device is a regular occurrence within the Australian research community. The ability to create reproducible, high yield materials requires greater understanding of the stresses, uniformities and deformations in a material over large areas. The proposed instrument can measure topography over many centimeters-squared with sub-micron spatial resolution, currently beyond the capabilities of researchers in Australia. By providing a quantitative method to measure surface textures, the instrument will also support Australian industries looking for improved process control.Read moreRead less