Exploiting Thickness Shear Mode Acoustic Resonance In Piezoelectric-on-Si Unreleased Micromechanical Resonators For Gravimetric Biosensing In Fluid-Damped Media
Ultrasonic Power Transfer Based On Aluminium Nitride Piezoelectric Diaphragm Architectures For Deep Wireless Powering Of Sub-Millimetre Biomedical Implants