Atomic Resolution Sensors for Imaging and Metrological Science. This project aims to create new sensing technologies for detecting motion on the atomic scale with Megahertz (MHz) bandwidth. Advanced signal processing and communication theory will be applied with the aim of developing new classes of capacitive, inductive and optical position sensors. The resolution and bandwidth are predicted to be a one-hundred fold improvement over the current state-of-the-art. Applications are expected to incl ....Atomic Resolution Sensors for Imaging and Metrological Science. This project aims to create new sensing technologies for detecting motion on the atomic scale with Megahertz (MHz) bandwidth. Advanced signal processing and communication theory will be applied with the aim of developing new classes of capacitive, inductive and optical position sensors. The resolution and bandwidth are predicted to be a one-hundred fold improvement over the current state-of-the-art. Applications are expected to include biomedical imaging, high-speed nanofabrication, high-resolution computer numerical control (CNC) machining, high-speed gas and chemical sensors, and ultra-precise seismometers and gyroscopes.Read moreRead less
Integrated Piezoelectric Microsystems for Actuation and Sensing. Piezoelectric transducers provide the highest positioning accuracy of any known actuator and the highest dynamic force resolution of any known sensor. However, these capabilities are limited to macro scale applications since piezoelectric materials are not compatible with integrated circuit (IC) or Micro-Electro-Mechanical Systems fabrication processes. This project aims to extend the use of piezoelectric materials to the meso- and ....Integrated Piezoelectric Microsystems for Actuation and Sensing. Piezoelectric transducers provide the highest positioning accuracy of any known actuator and the highest dynamic force resolution of any known sensor. However, these capabilities are limited to macro scale applications since piezoelectric materials are not compatible with integrated circuit (IC) or Micro-Electro-Mechanical Systems fabrication processes. This project aims to extend the use of piezoelectric materials to the meso- and micro-scale by fabricating miniature piezoelectric positioning and sensor systems. These devices will include six-axis nano-positioners and ultra-high resolution accelerometers and gyroscopes. This technology will create a new market for devices that are lower cost than macro-scale systems but provide higher performance than silicon based microsystems.Read moreRead less